http://id.southampton.ac.uk/facility/F10011
rdf:type oo:Facility
rdfs:label "Clean Rooms - Focused ion beam (FIB)"^^xsd:string
dcterms:description "Allows focused ion beam milling, electron-beam lithography and ion/electron beam-induced deposition, with parallel high resolution imaging, for the production of complex nanostructures in a broad range of materials. [nl]
Specification: 0.9 nm electron beam and 5 nm ion beam resoultion - Gas injection for bea-induced deposition of gold and platinum - Nabity pattern generator - Electron - beam lithography capability - Kleidiek nanomanipulator for TEM sample lift-out (other tool options available inc. microfluidic injection and four-point electrical probe) - 5-axis motorized stage for samples up to 150mm dia. (larger without full rotation) and 20mm thick - Ability to accept complex CAD pattern files."^^xsd:string
skos:notation "F10011"^^http://id.southampton.ac.uk/ns/equipment-code-scheme
http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within http://id.southampton.ac.uk/building/53
rdfs:comment "Allows focused ion beam milling, electron-beam lithography and ion/electron beam-induced deposition, with parallel high resolution imaging, for the production of complex nanostructures in a broad range of materials. [nl]
Specification: 0.9 nm electron beam and 5 nm ion beam resoultion - Gas injection for bea-induced deposition of gold and platinum - Nabity pattern generator - Electron - beam lithography capability - Kleidiek nanomanipulator for TEM sample lift-out (other tool options available inc. microfluidic injection and four-point electrical probe) - 5-axis motorized stage for samples up to 150mm dia. (larger without full rotation) and 20mm thick - Ability to accept complex CAD pattern files."^^xsd:string
dc:description "Allows focused ion beam milling, electron-beam lithography and ion/electron beam-induced deposition, with parallel high resolution imaging, for the production of complex nanostructures in a broad range of materials. [nl]
Specification: 0.9 nm electron beam and 5 nm ion beam resoultion - Gas injection for bea-induced deposition of gold and platinum - Nabity pattern generator - Electron - beam lithography capability - Kleidiek nanomanipulator for TEM sample lift-out (other tool options available inc. microfluidic injection and four-point electrical probe) - 5-axis motorized stage for samples up to 150mm dia. (larger without full rotation) and 20mm thick - Ability to accept complex CAD pattern files."^^xsd:string
oo:formalOrganization http://id.southampton.ac.uk/
oo:organizationPart http://id.southampton.ac.uk/org/F7, http://id.southampton.ac.uk/org/EH
oo:primaryContact http://id.southampton.ac.uk/facility/F10011#primary_contact
http://id.southampton.ac.uk/ns/facilityIsRCUKCosted "true"^^xsd:boolean
is oo:relatedFacility of http://id.southampton.ac.uk/equipment/E10741
 
http://id.southampton.ac.uk/building/53
rdf:type http://vocab.deri.ie/rooms#Building, http://id.southampton.ac.uk/ns/UoSBuilding
rdfs:label "New Mountbatten"^^xsd:string
geo:lat "50.93739"^^xsd:float
geo:long "-1.39862"^^xsd:float
skos:notation "53"^^http://id.southampton.ac.uk/ns/building-code-scheme
http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within http://id.southampton.ac.uk/site/1
http://data.ordnancesurvey.co.uk/ontology/spatialrelations/easting "442352"^^xsd:integer
http://data.ordnancesurvey.co.uk/ontology/spatialrelations/northing "115499"^^xsd:integer
http://id.southampton.ac.uk/ns/disabledGoPage https://www.accessable.co.uk/university-of-southampton/access-guides/building-53-mountbatten
http://id.southampton.ac.uk/ns/electricityTimeSeries "elec/b53/ekw"^^xsd:string
oo:formalOrganization http://id.southampton.ac.uk/
http://vocab.deri.ie/rooms#occupant http://id.southampton.ac.uk/org/FP, http://id.southampton.ac.uk/org/F7, http://id.southampton.ac.uk/org/EH, http://id.southampton.ac.uk/org/F7FP060000, http://id.southampton.ac.uk/org/F7EH010000, http://id.southampton.ac.uk/org/F7EH020000, http://id.southampton.ac.uk/org/F7EH040000, http://id.southampton.ac.uk/org/F7FP040000, http://id.southampton.ac.uk/org/F7FP070000
http://id.southampton.ac.uk/ns/ombielName "Bldg 53 (Mountbatten)"^^xsd:string
http://id.southampton.ac.uk/ns/buildingDate "2008"^^xsd:string
dcterms:spatial "POLYGON((-1.39913396019065 50.9372142159638,-1.39907008997395 50.9373032056671,-1.39891522041897 50.937259276929,-1.39890569827696 50.9372705987727,-1.39892932396893 50.9372784674524,-1.39859712697686 50.9377277159088,-1.39838674153732 50.93774396259,-1.3984577982763 50.937687410529,-1.39842294364327 50.9376771643524,-1.39822064304129 50.9376180648148,-1.39809892132029 50.937582514482,-1.39802930188577 50.9375621919069,-1.39799786085083 50.9375543798841,-1.3979582451468 50.9375445865492,-1.39795617902165 50.9375199050719,-1.39795384340191 50.9374888833799,-1.39795249592898 50.9374689004178,-1.39794872300479 50.9374351048503,-1.39794863317326 50.9374339726701,-1.39794486024907 50.9373881759563,-1.39794521957518 50.9373882891745,-1.39807691259583 50.93743340658,-1.39810988076676 50.9374439924643,-1.3983446105505 50.9371126021949,-1.39848726301762 50.9371526816356,-1.39856272150148 50.9370497091047,-1.39867465158588 50.9370818632785,-1.3986993552562 50.9370889960675,-1.39913396019065 50.9372142159638))"^^xsd:string
oo:lacksFeature http://id.southampton.ac.uk/building/53#residential
http://id.southampton.ac.uk/ns/buildingArchitect http://id.southampton.ac.uk/building/53#architect
http://id.southampton.ac.uk/ns/buildingFeature "Clean rooms"^^xsd:string
is foaf:depicts of https://data.southampton.ac.uk/image-archive/buildings/100/53.jpg, https://data.southampton.ac.uk/image-archive/buildings/1000/53.jpg, https://data.southampton.ac.uk/image-archive/buildings/1600/53.jpg, https://data.southampton.ac.uk/image-archive/buildings/1920/53.jpg, https://data.southampton.ac.uk/image-archive/buildings/200/53.jpg, https://data.southampton.ac.uk/image-archive/buildings/220x220/53.jpg, https://data.southampton.ac.uk/image-archive/buildings/240x260/53.jpg, https://data.southampton.ac.uk/image-archive/buildings/300/53.jpg, https://data.southampton.ac.uk/image-archive/buildings/320x198/53.jpg, https://data.southampton.ac.uk/image-archive/buildings/400/53.jpg, https://data.southampton.ac.uk/image-archive/buildings/480x297/53.jpg, https://data.southampton.ac.uk/image-archive/buildings/50/53.jpg, https://data.southampton.ac.uk/image-archive/buildings/600/53.jpg, https://data.southampton.ac.uk/image-archive/buildings/800/53.jpg, https://data.southampton.ac.uk/image-archive/buildings/800x600/53.jpg, https://data.southampton.ac.uk/image-archive/buildings/raw/53.jpg
is http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within of http://id.southampton.ac.uk/facility/F10011, http://id.southampton.ac.uk/equipment/E10741
 
https://data.southampton.ac.uk/image-archive/buildings/100/53.jpg
foaf:depicts http://id.southampton.ac.uk/building/53
rdf:type foaf:Image
dcterms:license http://creativecommons.org/licenses/by/3.0/
dcterms:creator http://id.ecs.soton.ac.uk/person/10955
dcterms:format http://purl.org/xtypes/Format-JPEG
dcterms:date "2010"^^xsd:date
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "66"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "100"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.5151515151515"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "2769"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/buildings/1000/53.jpg
foaf:depicts http://id.southampton.ac.uk/building/53
rdf:type foaf:Image
dcterms:license http://creativecommons.org/licenses/by/3.0/
dcterms:creator http://id.ecs.soton.ac.uk/person/10955
dcterms:format http://purl.org/xtypes/Format-JPEG
dcterms:date "2010"^^xsd:date
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "666"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "1000"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.5015015015015"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "116915"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/buildings/1600/53.jpg
foaf:depicts http://id.southampton.ac.uk/building/53
rdf:type foaf:Image
dcterms:license http://creativecommons.org/licenses/by/3.0/
dcterms:creator http://id.ecs.soton.ac.uk/person/10955
dcterms:format http://purl.org/xtypes/Format-JPEG
dcterms:date "2010"^^xsd:date
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "1066"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "1600"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.5009380863039"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "258345"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/buildings/1920/53.jpg
foaf:depicts http://id.southampton.ac.uk/building/53
rdf:type foaf:Image
dcterms:license http://creativecommons.org/licenses/by/3.0/
dcterms:creator http://id.ecs.soton.ac.uk/person/10955
dcterms:format http://purl.org/xtypes/Format-JPEG
dcterms:date "2010"^^xsd:date
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "1280"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "1920"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.5"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "348206"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/buildings/200/53.jpg
foaf:depicts http://id.southampton.ac.uk/building/53
rdf:type foaf:Image
dcterms:license http://creativecommons.org/licenses/by/3.0/
dcterms:creator http://id.ecs.soton.ac.uk/person/10955
dcterms:format http://purl.org/xtypes/Format-JPEG
dcterms:date "2010"^^xsd:date
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "133"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "200"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.5037593984962"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "7626"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/buildings/220x220/53.jpg
foaf:depicts http://id.southampton.ac.uk/building/53
rdf:type foaf:Image
dcterms:license http://creativecommons.org/licenses/by/3.0/
dcterms:creator http://id.ecs.soton.ac.uk/person/10955
dcterms:format http://purl.org/xtypes/Format-JPEG
dcterms:date "2010"^^xsd:date
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "220"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "220"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "12148"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/buildings/240x260/53.jpg
foaf:depicts http://id.southampton.ac.uk/building/53
rdf:type foaf:Image
dcterms:license http://creativecommons.org/licenses/by/3.0/
dcterms:creator http://id.ecs.soton.ac.uk/person/10955
dcterms:format http://purl.org/xtypes/Format-JPEG
dcterms:date "2010"^^xsd:date
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "260"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "240"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "0.92307692307692"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "14802"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/buildings/300/53.jpg
foaf:depicts http://id.southampton.ac.uk/building/53
rdf:type foaf:Image
dcterms:license http://creativecommons.org/licenses/by/3.0/
dcterms:creator http://id.ecs.soton.ac.uk/person/10955
dcterms:format http://purl.org/xtypes/Format-JPEG
dcterms:date "2010"^^xsd:date
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "200"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "300"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.5"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "14935"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/buildings/320x198/53.jpg
foaf:depicts http://id.southampton.ac.uk/building/53
rdf:type foaf:Image
dcterms:license http://creativecommons.org/licenses/by/3.0/
dcterms:creator http://id.ecs.soton.ac.uk/person/10955
dcterms:format http://purl.org/xtypes/Format-JPEG
dcterms:date "2010"^^xsd:date
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "198"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "320"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.6161616161616"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "15986"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/buildings/400/53.jpg
foaf:depicts http://id.southampton.ac.uk/building/53
rdf:type foaf:Image
dcterms:license http://creativecommons.org/licenses/by/3.0/
dcterms:creator http://id.ecs.soton.ac.uk/person/10955
dcterms:format http://purl.org/xtypes/Format-JPEG
dcterms:date "2010"^^xsd:date
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "266"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "400"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.5037593984962"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "24097"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/buildings/480x297/53.jpg
foaf:depicts http://id.southampton.ac.uk/building/53
rdf:type foaf:Image
dcterms:license http://creativecommons.org/licenses/by/3.0/
dcterms:creator http://id.ecs.soton.ac.uk/person/10955
dcterms:format http://purl.org/xtypes/Format-JPEG
dcterms:date "2010"^^xsd:date
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "297"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "480"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.6161616161616"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "31731"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/buildings/50/53.jpg
foaf:depicts http://id.southampton.ac.uk/building/53
rdf:type foaf:Image
dcterms:license http://creativecommons.org/licenses/by/3.0/
dcterms:creator http://id.ecs.soton.ac.uk/person/10955
dcterms:format http://purl.org/xtypes/Format-JPEG
dcterms:date "2010"^^xsd:date
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "33"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "50"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.5151515151515"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "1289"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/buildings/600/53.jpg
foaf:depicts http://id.southampton.ac.uk/building/53
rdf:type foaf:Image
dcterms:license http://creativecommons.org/licenses/by/3.0/
dcterms:creator http://id.ecs.soton.ac.uk/person/10955
dcterms:format http://purl.org/xtypes/Format-JPEG
dcterms:date "2010"^^xsd:date
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "400"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "600"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.5"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "48261"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/buildings/800/53.jpg
foaf:depicts http://id.southampton.ac.uk/building/53
rdf:type foaf:Image
dcterms:license http://creativecommons.org/licenses/by/3.0/
dcterms:creator http://id.ecs.soton.ac.uk/person/10955
dcterms:format http://purl.org/xtypes/Format-JPEG
dcterms:date "2010"^^xsd:date
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "533"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "800"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.5009380863039"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "79581"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/buildings/800x600/53.jpg
foaf:depicts http://id.southampton.ac.uk/building/53
rdf:type foaf:Image
dcterms:license http://creativecommons.org/licenses/by/3.0/
dcterms:creator http://id.ecs.soton.ac.uk/person/10955
dcterms:format http://purl.org/xtypes/Format-JPEG
dcterms:date "2010"^^xsd:date
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "600"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "800"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.3333333333333"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "87646"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/buildings/raw/53.jpg
foaf:depicts http://id.southampton.ac.uk/building/53
rdf:type foaf:Image
dcterms:license http://creativecommons.org/licenses/by/3.0/
dcterms:creator http://id.ecs.soton.ac.uk/person/10955
dcterms:format http://purl.org/xtypes/Format-JPEG
dcterms:date "2010"^^xsd:date
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "2304"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "3456"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.5"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "3855820"^^xsd:integer
dcterms:thing http://example.org
 
http://id.southampton.ac.uk/org/F7
rdf:type http://www.w3.org/ns/org#OrganizationalUnit, http://www.w3.org/ns/org#Organization
rdfs:label "Physical Sciences and Engineering"^^xsd:string
skos:notation "F7"^^http://id.southampton.ac.uk/ns/alphaCode
foaf:homepage http://www.fpse.soton.ac.uk/
is http://vocab.deri.ie/rooms#occupant of http://id.southampton.ac.uk/building/53
is oo:organizationPart of http://id.southampton.ac.uk/facility/F10011, http://id.southampton.ac.uk/equipment/E10741
 
http://id.southampton.ac.uk/org/EH
rdf:type http://www.w3.org/ns/org#OrganizationalUnit, http://www.w3.org/ns/org#Organization
rdfs:label "Optoelectronics Research Centre"^^xsd:string
skos:notation "EH"^^http://id.southampton.ac.uk/ns/alphaCode
foaf:homepage http://www.orc.soton.ac.uk/
is http://vocab.deri.ie/rooms#occupant of http://id.southampton.ac.uk/building/53
is oo:organizationPart of http://id.southampton.ac.uk/facility/F10011, http://id.southampton.ac.uk/equipment/E10741
 
http://id.southampton.ac.uk/facility/F10011#primary_contact
rdf:type foaf:Agent
foaf:phone tel:+442380593085
foaf:name "MACDONALD, KEVIN"^^xsd:string
is oo:primaryContact of http://id.southampton.ac.uk/facility/F10011
 
http://id.southampton.ac.uk/equipment/E10741
oo:relatedFacility http://id.southampton.ac.uk/facility/F10011
rdf:type oo:Equipment
rdfs:label "XF2 Insulator Enhanced Etch Gas Injector"^^xsd:string
dcterms:description "Gas injection system for chemically-assisted focused ion beam milling of insulating materials"^^xsd:string
skos:notation "E10741"^^http://id.southampton.ac.uk/ns/equipment-code-scheme
http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within http://id.southampton.ac.uk/building/53
rdfs:comment "Gas injection system for chemically-assisted focused ion beam milling of insulating materials"^^xsd:string
oo:contact http://id.southampton.ac.uk/equipment/E10741#secondary_contact
foaf:page http://www.zeplerinstitute.ac.uk/facilities/fib
dc:description "Gas injection system for chemically-assisted focused ion beam milling of insulating materials"^^xsd:string
oo:formalOrganization http://id.southampton.ac.uk/
oo:organizationPart http://id.southampton.ac.uk/org/F7, http://id.southampton.ac.uk/org/EH
oo:primaryContact http://id.southampton.ac.uk/equipment/E10741#primary_contact