→ rdf:type → http://vocab.deri.ie/rooms#Building, http://id.southampton.ac.uk/ns/UoSBuilding

→ rdfs:label → "New Mountbatten"

→ http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within → http://id.southampton.ac.uk/site/1

→ skos:notation → "53"^^http://id.southampton.ac.uk/ns/building-code-scheme

→ oo:formalOrganization → http://id.southampton.ac.uk/

→ geo:lat → "50.93739"^^xsd:float

→ geo:long → "-1.39862"^^xsd:float

→ http://id.southampton.ac.uk/ns/disabledGoPage → https://www.accessable.co.uk/university-of-southampton/access-guides/building-53-mountbatten

→ http://vocab.deri.ie/rooms#occupant → http://id.southampton.ac.uk/org/F7, http://id.southampton.ac.uk/org/FP, http://id.southampton.ac.uk/org/EH, http://id.southampton.ac.uk/org/F7FP040000, http://id.southampton.ac.uk/org/F7EH020000, http://id.southampton.ac.uk/org/F7FP060000, http://id.southampton.ac.uk/org/F7EH010000, http://id.southampton.ac.uk/org/F7EH040000, http://id.southampton.ac.uk/org/F7FP070000

→ oo:lacksFeature → http://id.southampton.ac.uk/building/53#residential

→ http://id.southampton.ac.uk/ns/buildingArchitect → http://id.southampton.ac.uk/building/53#architect

→ http://id.southampton.ac.uk/ns/buildingDate → "2008"

→ http://id.southampton.ac.uk/ns/buildingFeature → "Clean rooms"

→ dcterms:spatial → "POLYGON((-1.39913396019065 50.9372142159638,-1.39907008997395 50.9373032056671,-1.39891522041897 50.937259276929,-1.39890569827696 50.9372705987727,-1.39892932396893 50.9372784674524,-1.39859712697686 50.9377277159088,-1.39838674153732 50.93774396259,-1.3984577982763 50.937687410529,-1.39842294364327 50.9376771643524,-1.39822064304129 50.9376180648148,-1.39809892132029 50.937582514482,-1.39802930188577 50.9375621919069,-1.39799786085083 50.9375543798841,-1.3979582451468 50.9375445865492,-1.39795617902165 50.9375199050719,-1.39795384340191 50.9374888833799,-1.39795249592898 50.9374689004178,-1.39794872300479 50.9374351048503,-1.39794863317326 50.9374339726701,-1.39794486024907 50.9373881759563,-1.39794521957518 50.9373882891745,-1.39807691259583 50.93743340658,-1.39810988076676 50.9374439924643,-1.3983446105505 50.9371126021949,-1.39848726301762 50.9371526816356,-1.39856272150148 50.9370497091047,-1.39867465158588 50.9370818632785,-1.3986993552562 50.9370889960675,-1.39913396019065 50.9372142159638))"

← is http://purl.org/openorg/portals/connectsBuilding of ← http://id.southampton.ac.uk/building-portal/53-A, http://id.southampton.ac.uk/building-portal/53-B

http://id.southampton.ac.uk/site/1

→ rdf:type → http://www.w3.org/ns/org#Site, http://id.southampton.ac.uk/ns/UoSSite, http://vocab.deri.ie/rooms#Site

→ rdfs:label → "Highfield Campus"

← is http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within of ← http://id.southampton.ac.uk/building/53, http://id.southampton.ac.uk/point-of-service/sculpture-erica

http://id.southampton.ac.uk/

→ rdf:type → http://www.w3.org/ns/org#Organization, http://purl.org/vocab/aiiso/schema#Institution, http://www.w3.org/ns/org#FormalOrganization, foaf:Organization

→ rdfs:label → "University of Southampton"

http://id.southampton.ac.uk/org/F7

→ rdf:type → http://www.w3.org/ns/org#OrganizationalUnit, http://www.w3.org/ns/org#Organization

→ rdfs:label → "Physical Sciences and Engineering"

← is http://vocab.deri.ie/rooms#occupant of ← http://id.southampton.ac.uk/building/53

http://id.southampton.ac.uk/org/FP

→ rdf:type → http://www.w3.org/ns/org#Organization

→ rdfs:label → "School of Electronics & Computer Science"

← is http://vocab.deri.ie/rooms#occupant of ← http://id.southampton.ac.uk/building/53

http://id.southampton.ac.uk/org/EH

→ rdf:type → http://www.w3.org/ns/org#OrganizationalUnit, http://www.w3.org/ns/org#Organization

→ rdfs:label → "Optoelectronics Research Centre"

← is http://vocab.deri.ie/rooms#occupant of ← http://id.southampton.ac.uk/building/53

http://id.southampton.ac.uk/org/F7FP040000

→ rdf:type → http://www.w3.org/ns/org#OrganizationalUnit, http://www.w3.org/ns/org#Organization

→ rdfs:label → "NANO"

← is http://vocab.deri.ie/rooms#occupant of ← http://id.southampton.ac.uk/building/53

http://id.southampton.ac.uk/org/F7EH020000

→ rdf:type → http://www.w3.org/ns/org#OrganizationalUnit, http://www.w3.org/ns/org#Organization

→ rdfs:label → "ORC - Enterprise"

← is http://vocab.deri.ie/rooms#occupant of ← http://id.southampton.ac.uk/building/53

http://id.southampton.ac.uk/org/F7FP060000

→ rdf:type → http://www.w3.org/ns/org#OrganizationalUnit, http://www.w3.org/ns/org#Organization

→ rdfs:label → "Comms, Signal Processing & Control"

← is http://vocab.deri.ie/rooms#occupant of ← http://id.southampton.ac.uk/building/53

http://id.southampton.ac.uk/org/F7EH010000

→ rdf:type → http://www.w3.org/ns/org#OrganizationalUnit, http://www.w3.org/ns/org#Organization

→ rdfs:label → "ORC Research"

← is http://vocab.deri.ie/rooms#occupant of ← http://id.southampton.ac.uk/building/53

http://id.southampton.ac.uk/org/F7EH040000

→ rdf:type → http://www.w3.org/ns/org#OrganizationalUnit, http://www.w3.org/ns/org#Organization

→ rdfs:label → "Technical Support Staff"

← is http://vocab.deri.ie/rooms#occupant of ← http://id.southampton.ac.uk/building/53

http://id.southampton.ac.uk/org/F7FP070000

→ rdf:type → http://www.w3.org/ns/org#OrganizationalUnit, http://www.w3.org/ns/org#Organization

→ rdfs:label → "Electronic & Software Systems"

← is http://vocab.deri.ie/rooms#occupant of ← http://id.southampton.ac.uk/building/53

http://id.southampton.ac.uk/building/53#residential

→ rdf:type → http://id.southampton.ac.uk/ns/PlaceFeature-ResidentialUse

→ rdfs:label → "Building 53 is non-residential"

← is oo:lacksFeature of ← http://id.southampton.ac.uk/building/53

http://id.southampton.ac.uk/building/53#architect

→ rdfs:label → "Jestico + Whiles"

← is http://id.southampton.ac.uk/ns/buildingArchitect of ← http://id.southampton.ac.uk/building/53

http://id.southampton.ac.uk/facility/F10015

→ http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within → http://id.southampton.ac.uk/building/53

→ oo:contact → http://id.southampton.ac.uk/facility/F10015#secondary_contact

→ rdf:type → oo:Facility

→ dcterms:description → "The clean room provides a range of characterisation equipment for device and material characterisation. Plan view imaging of a sample surface can be performed using field emission scanning electron microscopy (FESEM), helium ion microscopy and scanning probe microscopy. Cross-section imaging can be achieved by first making a cross-sectional cut using the focussed ion beam (FIB) system and then imaging in-situ using field emission scanning electron microscopy."

→ skos:notation → "F10015"^^http://id.southampton.ac.uk/ns/equipment-code-scheme

→ oo:formalOrganization → http://id.southampton.ac.uk/

→ dc:description → "The clean room provides a range of characterisation equipment for device and material characterisation. Plan view imaging of a sample surface can be performed using field emission scanning electron microscopy (FESEM), helium ion microscopy and scanning probe microscopy. Cross-section imaging can be achieved by first making a cross-sectional cut using the focussed ion beam (FIB) system and then imaging in-situ using field emission scanning electron microscopy."

→ rdfs:comment → "The clean room provides a range of characterisation equipment for device and material characterisation. Plan view imaging of a sample surface can be performed using field emission scanning electron microscopy (FESEM), helium ion microscopy and scanning probe microscopy. Cross-section imaging can be achieved by first making a cross-sectional cut using the focussed ion beam (FIB) system and then imaging in-situ using field emission scanning electron microscopy."

→ oo:organizationPart → http://id.southampton.ac.uk/org/F7, http://id.southampton.ac.uk/org/FP

→ oo:primaryContact → http://id.southampton.ac.uk/facility/F10015#primary_contact

→ rdfs:label → "ECS - Characterisation (Measurement)"

→ http://id.southampton.ac.uk/ns/facilityIsRCUKCosted → "true"^^xsd:boolean

http://id.southampton.ac.uk/facility/F10007

→ http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within → http://id.southampton.ac.uk/building/53

→ rdf:type → oo:Facility

→ dcterms:description → "Our Novel glass facilties offer a wide range of specialized glass making and fibre drawing equipment including: a variety of horizontal and vertical tube furnaces, chamber furnaces, high and low temperature ovens, vacuum processing, L-shaped glove box system for batching, melting, annealing and casting of glass under dry nitrogen atmosphere (10ppm), testometric extrusion equipment, hydraulic extrusion equipment, thermogravimetric and thermomechanical analyzers."

→ skos:notation → "F10007"^^http://id.southampton.ac.uk/ns/equipment-code-scheme

→ oo:formalOrganization → http://id.southampton.ac.uk/

→ dc:description → "Our Novel glass facilties offer a wide range of specialized glass making and fibre drawing equipment including: a variety of horizontal and vertical tube furnaces, chamber furnaces, high and low temperature ovens, vacuum processing, L-shaped glove box system for batching, melting, annealing and casting of glass under dry nitrogen atmosphere (10ppm), testometric extrusion equipment, hydraulic extrusion equipment, thermogravimetric and thermomechanical analyzers."

→ rdfs:comment → "Our Novel glass facilties offer a wide range of specialized glass making and fibre drawing equipment including: a variety of horizontal and vertical tube furnaces, chamber furnaces, high and low temperature ovens, vacuum processing, L-shaped glove box system for batching, melting, annealing and casting of glass under dry nitrogen atmosphere (10ppm), testometric extrusion equipment, hydraulic extrusion equipment, thermogravimetric and thermomechanical analyzers."

→ oo:organizationPart → http://id.southampton.ac.uk/org/F7, http://id.southampton.ac.uk/org/EH

→ oo:primaryContact → http://id.southampton.ac.uk/facility/F10007#primary_contact

→ rdfs:label → "Clean Rooms - Novel Glass"

→ http://id.southampton.ac.uk/ns/facilityIsRCUKCosted → "true"^^xsd:boolean

http://id.southampton.ac.uk/facility/F10008

→ http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within → http://id.southampton.ac.uk/building/53

→ rdf:type → oo:Facility

→ dcterms:description → "Our Soft Glass facilities offer a wide range of specialized glass making and fibre drawing equipment including: [nl]
A 5m Fibre Drawing Tower with cane and fibre drawing capabilities up to 1100oC; High Temperature (1700oC & 1800oC) Elevator Hearth Furnaces and High Temperature (1200oC)Chamber Furnaces for Glass Melting & Processing; Specialised (1500oC) Glass Rolling Furnace; High and Low temperature ovens; L-shaped glove box system for batching, melting, annealing and casting of glass under dry nitrogen atmosphere (<1ppm); Testometric Precision Glass Extrusion equipment; Hydraulic Glass Extrusion equipment; Fibre Characterisation Laboratory; Access to a variety of analytical equipment, including: SEM facilities; Optical Microscope Facilities, Thermogravimetric and Thermomechanical analyzers."

→ skos:notation → "F10008"^^http://id.southampton.ac.uk/ns/equipment-code-scheme

→ oo:formalOrganization → http://id.southampton.ac.uk/

→ dc:description → "Our Soft Glass facilities offer a wide range of specialized glass making and fibre drawing equipment including: [nl]
A 5m Fibre Drawing Tower with cane and fibre drawing capabilities up to 1100oC; High Temperature (1700oC & 1800oC) Elevator Hearth Furnaces and High Temperature (1200oC)Chamber Furnaces for Glass Melting & Processing; Specialised (1500oC) Glass Rolling Furnace; High and Low temperature ovens; L-shaped glove box system for batching, melting, annealing and casting of glass under dry nitrogen atmosphere (<1ppm); Testometric Precision Glass Extrusion equipment; Hydraulic Glass Extrusion equipment; Fibre Characterisation Laboratory; Access to a variety of analytical equipment, including: SEM facilities; Optical Microscope Facilities, Thermogravimetric and Thermomechanical analyzers."

→ rdfs:comment → "Our Soft Glass facilities offer a wide range of specialized glass making and fibre drawing equipment including: [nl]
A 5m Fibre Drawing Tower with cane and fibre drawing capabilities up to 1100oC; High Temperature (1700oC & 1800oC) Elevator Hearth Furnaces and High Temperature (1200oC)Chamber Furnaces for Glass Melting & Processing; Specialised (1500oC) Glass Rolling Furnace; High and Low temperature ovens; L-shaped glove box system for batching, melting, annealing and casting of glass under dry nitrogen atmosphere (<1ppm); Testometric Precision Glass Extrusion equipment; Hydraulic Glass Extrusion equipment; Fibre Characterisation Laboratory; Access to a variety of analytical equipment, including: SEM facilities; Optical Microscope Facilities, Thermogravimetric and Thermomechanical analyzers."

→ oo:organizationPart → http://id.southampton.ac.uk/org/F7, http://id.southampton.ac.uk/org/EH

→ oo:primaryContact → http://id.southampton.ac.uk/facility/F10008#primary_contact

→ rdfs:label → "Clean Rooms - Compound Glass"

→ http://id.southampton.ac.uk/ns/facilityIsRCUKCosted → "true"^^xsd:boolean

http://id.southampton.ac.uk/facility/F10014

→ http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within → http://id.southampton.ac.uk/building/53

→ rdf:type → oo:Facility

→ dcterms:description → "The Southampton Nanofabrication Centre is a state-of-the-art facility for microfabrication and high-spec nanofabrication, as well as a wide range of characterisation capabilities housed in the new Mountbatten Complex at the University of Southampton. One of the premiere cleanrooms in Europe, the Centre has a uniquely broad range of technologies, combining traditional and novel top down fabrication with state-of-the-art bottom up fabrication. This allows us to develop and produce a wide range of devices in diverse fields such as electronics, nanotechnology and bionanotechnology and incorporate them into an equally comprehensive array of nano and microsystems for analysis and use. The characterisation capability is similarly extensive catalogue of microscopes and test gear, from nanometre resolution scanning microscopes to electrical, magnetic and RF analysis. A detailed equiment list can be found at http://www.southampton-nanofab.com/machineDatabase/"

→ skos:notation → "F10014"^^http://id.southampton.ac.uk/ns/equipment-code-scheme

→ oo:formalOrganization → http://id.southampton.ac.uk/

→ dc:description → "The Southampton Nanofabrication Centre is a state-of-the-art facility for microfabrication and high-spec nanofabrication, as well as a wide range of characterisation capabilities housed in the new Mountbatten Complex at the University of Southampton. One of the premiere cleanrooms in Europe, the Centre has a uniquely broad range of technologies, combining traditional and novel top down fabrication with state-of-the-art bottom up fabrication. This allows us to develop and produce a wide range of devices in diverse fields such as electronics, nanotechnology and bionanotechnology and incorporate them into an equally comprehensive array of nano and microsystems for analysis and use. The characterisation capability is similarly extensive catalogue of microscopes and test gear, from nanometre resolution scanning microscopes to electrical, magnetic and RF analysis. A detailed equiment list can be found at http://www.southampton-nanofab.com/machineDatabase/"

→ rdfs:comment → "The Southampton Nanofabrication Centre is a state-of-the-art facility for microfabrication and high-spec nanofabrication, as well as a wide range of characterisation capabilities housed in the new Mountbatten Complex at the University of Southampton. One of the premiere cleanrooms in Europe, the Centre has a uniquely broad range of technologies, combining traditional and novel top down fabrication with state-of-the-art bottom up fabrication. This allows us to develop and produce a wide range of devices in diverse fields such as electronics, nanotechnology and bionanotechnology and incorporate them into an equally comprehensive array of nano and microsystems for analysis and use. The characterisation capability is similarly extensive catalogue of microscopes and test gear, from nanometre resolution scanning microscopes to electrical, magnetic and RF analysis. A detailed equiment list can be found at http://www.southampton-nanofab.com/machineDatabase/"

→ oo:organizationPart → http://id.southampton.ac.uk/org/F7, http://id.southampton.ac.uk/org/FP

→ oo:primaryContact → http://id.southampton.ac.uk/facility/F10014#primary_contact

→ rdfs:label → "Clean Rooms - Nanofabrication"

→ http://id.southampton.ac.uk/ns/facilityIsRCUKCosted → "true"^^xsd:boolean

http://id.southampton.ac.uk/facility/F10010

→ http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within → http://id.southampton.ac.uk/building/53

→ rdf:type → oo:Facility

→ dcterms:description → "The Integrated Photonics Cleanroom is a 200m² Class 1000 facility with local areas of Class 100, designed for planar processing of a very wide range of materials. The prime purpose of this facility is to be able to take raw materials, ORC-made materials, or commercial materials and process them to realise photonic devices for use in applications from telecommunications to all-optical data processing and from biochemical sensing to the lab-on-a-chip. Polishing and scanning electron microscopy are available outside the cleanroom. The major equipment items are: Karl-Suss MA6 double-sided mask aligner, OPT Plasmalab 400 Sputtering Machine, Ionafab 300 Plus Reactive Ion Beam Depostit/Etcher, Edwards Auto 306 thermal evaporators, Edwards Auto 306 electron beam evaporator, Materials Research 2300c Furnace, Severn (STS) 1200c Tube Furnace, Instron 600c Ion-Exchange Furnaces, KLA Tencor P-16 Stylus Profiler, Nikon LV100D Optical Microscope and Wet Benches for Chemical Processing."

→ skos:notation → "F10010"^^http://id.southampton.ac.uk/ns/equipment-code-scheme

→ oo:formalOrganization → http://id.southampton.ac.uk/

→ dc:description → "The Integrated Photonics Cleanroom is a 200m² Class 1000 facility with local areas of Class 100, designed for planar processing of a very wide range of materials. The prime purpose of this facility is to be able to take raw materials, ORC-made materials, or commercial materials and process them to realise photonic devices for use in applications from telecommunications to all-optical data processing and from biochemical sensing to the lab-on-a-chip. Polishing and scanning electron microscopy are available outside the cleanroom. The major equipment items are: Karl-Suss MA6 double-sided mask aligner, OPT Plasmalab 400 Sputtering Machine, Ionafab 300 Plus Reactive Ion Beam Depostit/Etcher, Edwards Auto 306 thermal evaporators, Edwards Auto 306 electron beam evaporator, Materials Research 2300c Furnace, Severn (STS) 1200c Tube Furnace, Instron 600c Ion-Exchange Furnaces, KLA Tencor P-16 Stylus Profiler, Nikon LV100D Optical Microscope and Wet Benches for Chemical Processing."

→ rdfs:comment → "The Integrated Photonics Cleanroom is a 200m² Class 1000 facility with local areas of Class 100, designed for planar processing of a very wide range of materials. The prime purpose of this facility is to be able to take raw materials, ORC-made materials, or commercial materials and process them to realise photonic devices for use in applications from telecommunications to all-optical data processing and from biochemical sensing to the lab-on-a-chip. Polishing and scanning electron microscopy are available outside the cleanroom. The major equipment items are: Karl-Suss MA6 double-sided mask aligner, OPT Plasmalab 400 Sputtering Machine, Ionafab 300 Plus Reactive Ion Beam Depostit/Etcher, Edwards Auto 306 thermal evaporators, Edwards Auto 306 electron beam evaporator, Materials Research 2300c Furnace, Severn (STS) 1200c Tube Furnace, Instron 600c Ion-Exchange Furnaces, KLA Tencor P-16 Stylus Profiler, Nikon LV100D Optical Microscope and Wet Benches for Chemical Processing."

→ oo:organizationPart → http://id.southampton.ac.uk/org/F7, http://id.southampton.ac.uk/org/EH

→ oo:primaryContact → http://id.southampton.ac.uk/facility/F10010#primary_contact

→ rdfs:label → "Clean Rooms - Integrated Photonics"

→ http://id.southampton.ac.uk/ns/facilityIsRCUKCosted → "true"^^xsd:boolean

http://id.southampton.ac.uk/facility/F10005

→ http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within → http://id.southampton.ac.uk/building/53

→ rdf:type → oo:Facility

→ dcterms:description → "The Silica Fibre facilities occupy over 160 sq.m of class 10,000 cleanroom space and comprise state-of-the-art fabrication equipment. This includes modified chemical vapour deposition (MCVD) lathes, a glassworking lathe, a 6 metre high dual-sided fibre drawing tower, and dedicated chemical preparation areas for glass etching and machining. The facility is capable of producing standard preforms and optical fibre to a high quality as well as retaining the versatility to fabricate the huge variety of speciality fibres, including microstructured fibres required for research."

→ skos:notation → "F10005"^^http://id.southampton.ac.uk/ns/equipment-code-scheme

→ oo:formalOrganization → http://id.southampton.ac.uk/

→ dc:description → "The Silica Fibre facilities occupy over 160 sq.m of class 10,000 cleanroom space and comprise state-of-the-art fabrication equipment. This includes modified chemical vapour deposition (MCVD) lathes, a glassworking lathe, a 6 metre high dual-sided fibre drawing tower, and dedicated chemical preparation areas for glass etching and machining. The facility is capable of producing standard preforms and optical fibre to a high quality as well as retaining the versatility to fabricate the huge variety of speciality fibres, including microstructured fibres required for research."

→ rdfs:comment → "The Silica Fibre facilities occupy over 160 sq.m of class 10,000 cleanroom space and comprise state-of-the-art fabrication equipment. This includes modified chemical vapour deposition (MCVD) lathes, a glassworking lathe, a 6 metre high dual-sided fibre drawing tower, and dedicated chemical preparation areas for glass etching and machining. The facility is capable of producing standard preforms and optical fibre to a high quality as well as retaining the versatility to fabricate the huge variety of speciality fibres, including microstructured fibres required for research."

→ oo:organizationPart → http://id.southampton.ac.uk/org/F7, http://id.southampton.ac.uk/org/EH

→ oo:primaryContact → http://id.southampton.ac.uk/facility/F10005#primary_contact

→ rdfs:label → "Clean Rooms - Silica"

→ http://id.southampton.ac.uk/ns/facilityIsRCUKCosted → "true"^^xsd:boolean

http://id.southampton.ac.uk/facility/F10011

→ http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within → http://id.southampton.ac.uk/building/53

→ rdf:type → oo:Facility

→ dcterms:description → "Allows focused ion beam milling, electron-beam lithography and ion/electron beam-induced deposition, with parallel high resolution imaging, for the production of complex nanostructures in a broad range of materials. [nl]
Specification: 0.9 nm electron beam and 5 nm ion beam resoultion - Gas injection for bea-induced deposition of gold and platinum - Nabity pattern generator - Electron - beam lithography capability - Kleidiek nanomanipulator for TEM sample lift-out (other tool options available inc. microfluidic injection and four-point electrical probe) - 5-axis motorized stage for samples up to 150mm dia. (larger without full rotation) and 20mm thick - Ability to accept complex CAD pattern files."

→ skos:notation → "F10011"^^http://id.southampton.ac.uk/ns/equipment-code-scheme

→ oo:formalOrganization → http://id.southampton.ac.uk/

→ dc:description → "Allows focused ion beam milling, electron-beam lithography and ion/electron beam-induced deposition, with parallel high resolution imaging, for the production of complex nanostructures in a broad range of materials. [nl]
Specification: 0.9 nm electron beam and 5 nm ion beam resoultion - Gas injection for bea-induced deposition of gold and platinum - Nabity pattern generator - Electron - beam lithography capability - Kleidiek nanomanipulator for TEM sample lift-out (other tool options available inc. microfluidic injection and four-point electrical probe) - 5-axis motorized stage for samples up to 150mm dia. (larger without full rotation) and 20mm thick - Ability to accept complex CAD pattern files."

→ rdfs:comment → "Allows focused ion beam milling, electron-beam lithography and ion/electron beam-induced deposition, with parallel high resolution imaging, for the production of complex nanostructures in a broad range of materials. [nl]
Specification: 0.9 nm electron beam and 5 nm ion beam resoultion - Gas injection for bea-induced deposition of gold and platinum - Nabity pattern generator - Electron - beam lithography capability - Kleidiek nanomanipulator for TEM sample lift-out (other tool options available inc. microfluidic injection and four-point electrical probe) - 5-axis motorized stage for samples up to 150mm dia. (larger without full rotation) and 20mm thick - Ability to accept complex CAD pattern files."

→ oo:organizationPart → http://id.southampton.ac.uk/org/F7, http://id.southampton.ac.uk/org/EH

→ oo:primaryContact → http://id.southampton.ac.uk/facility/F10011#primary_contact

→ rdfs:label → "Clean Rooms - Focused ion beam (FIB)"

→ http://id.southampton.ac.uk/ns/facilityIsRCUKCosted → "true"^^xsd:boolean

http://id.southampton.ac.uk/facility/F10012

→ http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within → http://id.southampton.ac.uk/building/53

→ rdf:type → oo:Facility

→ dcterms:description → "The ORC SEM Facility comprises of a Zeiss Evo50 SEM fitted with an Oxford Instruments INCA 250 x-ray analysis system. In addition to dedicated Gold and Carbon deposition equipment, the SEM features variable pressure operation allowing analysis of both conductive and non-conductive sample. The INCA 250 x-ray analysis system provides elemental analysis capabilities."

→ skos:notation → "F10012"^^http://id.southampton.ac.uk/ns/equipment-code-scheme

→ oo:formalOrganization → http://id.southampton.ac.uk/

→ dc:description → "The ORC SEM Facility comprises of a Zeiss Evo50 SEM fitted with an Oxford Instruments INCA 250 x-ray analysis system. In addition to dedicated Gold and Carbon deposition equipment, the SEM features variable pressure operation allowing analysis of both conductive and non-conductive sample. The INCA 250 x-ray analysis system provides elemental analysis capabilities."

→ rdfs:comment → "The ORC SEM Facility comprises of a Zeiss Evo50 SEM fitted with an Oxford Instruments INCA 250 x-ray analysis system. In addition to dedicated Gold and Carbon deposition equipment, the SEM features variable pressure operation allowing analysis of both conductive and non-conductive sample. The INCA 250 x-ray analysis system provides elemental analysis capabilities."

→ oo:organizationPart → http://id.southampton.ac.uk/org/F7, http://id.southampton.ac.uk/org/EH

→ oo:primaryContact → http://id.southampton.ac.uk/facility/F10012#primary_contact

→ rdfs:label → "Scanning Electron Microscope (SEM)"

→ http://id.southampton.ac.uk/ns/facilityIsRCUKCosted → "true"^^xsd:boolean

http://id.southampton.ac.uk/facility/F10009

→ http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within → http://id.southampton.ac.uk/building/53

→ rdf:type → oo:Facility

→ dcterms:description → "The ORC at Southampton has a state-of-the-art Flame Hydrolysis Deposition tool for growth of silica-on-silicon waveguide structures. The system allows the incorporation of germanium, phosphorous and boron doping within the silica, and is particularly optimised for high photosensitivity layer growth. The tool can grow films ranging from 2 microns to 20 microns in thickness."

→ skos:notation → "F10009"^^http://id.southampton.ac.uk/ns/equipment-code-scheme

→ oo:formalOrganization → http://id.southampton.ac.uk/

→ dc:description → "The ORC at Southampton has a state-of-the-art Flame Hydrolysis Deposition tool for growth of silica-on-silicon waveguide structures. The system allows the incorporation of germanium, phosphorous and boron doping within the silica, and is particularly optimised for high photosensitivity layer growth. The tool can grow films ranging from 2 microns to 20 microns in thickness."

→ rdfs:comment → "The ORC at Southampton has a state-of-the-art Flame Hydrolysis Deposition tool for growth of silica-on-silicon waveguide structures. The system allows the incorporation of germanium, phosphorous and boron doping within the silica, and is particularly optimised for high photosensitivity layer growth. The tool can grow films ranging from 2 microns to 20 microns in thickness."

→ oo:organizationPart → http://id.southampton.ac.uk/org/F7, http://id.southampton.ac.uk/org/EH

→ oo:primaryContact → http://id.southampton.ac.uk/facility/F10009#primary_contact

→ rdfs:label → "Clean Rooms - FHD"

→ http://id.southampton.ac.uk/ns/facilityIsRCUKCosted → "true"^^xsd:boolean

http://id.southampton.ac.uk/facility/F10006

→ http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within → http://id.southampton.ac.uk/building/53

→ rdf:type → oo:Facility

→ dcterms:description → "The FAST LAB facility consists of three sections (one `clean` lab dedicated to optical bio-science) and the other two supplied with femtosecond laser systems and optical tables with a total floor space of 72 square metres. The £1.1M installation and recent £300K upgrade provides the ORC and its collaborators with one of the most comprehensive and flexible commercial ultrafast laser system in the world. The FAST Lab can be hired on a daily basis in order to assist your particular line of research. Whether you are a member of the ORC, a member of another department within this or another university, or even a scientist from industry or other research establishment, you are welcome to make use of the FAST Lab facility. Moreover, we are keen to establish collaborations with other experimentalists"

→ skos:notation → "F10006"^^http://id.southampton.ac.uk/ns/equipment-code-scheme

→ oo:formalOrganization → http://id.southampton.ac.uk/

→ dc:description → "The FAST LAB facility consists of three sections (one `clean` lab dedicated to optical bio-science) and the other two supplied with femtosecond laser systems and optical tables with a total floor space of 72 square metres. The £1.1M installation and recent £300K upgrade provides the ORC and its collaborators with one of the most comprehensive and flexible commercial ultrafast laser system in the world. The FAST Lab can be hired on a daily basis in order to assist your particular line of research. Whether you are a member of the ORC, a member of another department within this or another university, or even a scientist from industry or other research establishment, you are welcome to make use of the FAST Lab facility. Moreover, we are keen to establish collaborations with other experimentalists"

→ rdfs:comment → "The FAST LAB facility consists of three sections (one `clean` lab dedicated to optical bio-science) and the other two supplied with femtosecond laser systems and optical tables with a total floor space of 72 square metres. The £1.1M installation and recent £300K upgrade provides the ORC and its collaborators with one of the most comprehensive and flexible commercial ultrafast laser system in the world. The FAST Lab can be hired on a daily basis in order to assist your particular line of research. Whether you are a member of the ORC, a member of another department within this or another university, or even a scientist from industry or other research establishment, you are welcome to make use of the FAST Lab facility. Moreover, we are keen to establish collaborations with other experimentalists"

→ oo:organizationPart → http://id.southampton.ac.uk/org/F7, http://id.southampton.ac.uk/org/EH

→ oo:primaryContact → http://id.southampton.ac.uk/facility/F10006#primary_contact

→ rdfs:label → "FAST Lab - Laser Laboratory"

→ http://id.southampton.ac.uk/ns/facilityIsRCUKCosted → "false"^^xsd:boolean

http://id.southampton.ac.uk/equipment/E10264

→ http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within → http://id.southampton.ac.uk/building/53

→ oo:contact → http://id.southampton.ac.uk/equipment/E10264#secondary_contact