http://id.southampton.ac.uk/equipment/E10240
rdf:type oo:Equipment
rdfs:label "Opt System 100 Metal Etcher"^^xsd:string
dcterms:description "The etch mechanism of RIE is achieved by using the reactive gas plasma generated by strong RF source (13.56 MHz) to chemically ion etch the material of the samples. Depending on the process recipe, the material⿿s etched profile can achieve high anisotropy. The DP06 RIE80+ system is configured for multimaterial etching like silica, silicon nitride, polymer, III-V based, semiconductor-metal, polysilicon and amorphous silicon."^^xsd:string
skos:notation "E10240"^^http://id.southampton.ac.uk/ns/equipment-code-scheme
http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within http://id.southampton.ac.uk/building/53
rdfs:comment "The etch mechanism of RIE is achieved by using the reactive gas plasma generated by strong RF source (13.56 MHz) to chemically ion etch the material of the samples. Depending on the process recipe, the material⿿s etched profile can achieve high anisotropy. The DP06 RIE80+ system is configured for multimaterial etching like silica, silicon nitride, polymer, III-V based, semiconductor-metal, polysilicon and amorphous silicon."^^xsd:string
foaf:depiction http://data.southampton.ac.uk/image-archive/equipment/raw/E10240-200640-P1000881.jpg
oo:contact http://id.southampton.ac.uk/equipment/E10240#secondary_contact
foaf:page http://www.southampton-nanofab.com/fabrication/dryEtch.php
dc:description "The etch mechanism of RIE is achieved by using the reactive gas plasma generated by strong RF source (13.56 MHz) to chemically ion etch the material of the samples. Depending on the process recipe, the material⿿s etched profile can achieve high anisotropy. The DP06 RIE80+ system is configured for multimaterial etching like silica, silicon nitride, polymer, III-V based, semiconductor-metal, polysilicon and amorphous silicon."^^xsd:string
oo:formalOrganization http://id.southampton.ac.uk/
oo:organizationPart http://id.southampton.ac.uk/org/FP, http://id.southampton.ac.uk/org/F7
oo:primaryContact http://id.southampton.ac.uk/equipment/E10240#primary_contact
oo:relatedFacility http://id.southampton.ac.uk/facility/F10014
is foaf:depicts of http://data.southampton.ac.uk/image-archive/equipment/raw/E10240-200640-P1000881.jpg, http://data.southampton.ac.uk/image-archive/equipment/100/E10240-200640-P1000881.jpg, http://data.southampton.ac.uk/image-archive/equipment/200/E10240-200640-P1000881.jpg, http://data.southampton.ac.uk/image-archive/equipment/300/E10240-200640-P1000881.jpg, http://data.southampton.ac.uk/image-archive/equipment/400/E10240-200640-P1000881.jpg, http://data.southampton.ac.uk/image-archive/equipment/50/E10240-200640-P1000881.jpg, https://data.southampton.ac.uk/image-archive/equipment/100/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/1000/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/1600/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/1920/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/200/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/220x220/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/240x260/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/300/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/320x198/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/400/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/480x297/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/50/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/600/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/800/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/800x600/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/raw/E10240-200640-P1000881.JPG
 
http://id.southampton.ac.uk/building/53
rdf:type http://vocab.deri.ie/rooms#Building, http://id.southampton.ac.uk/ns/UoSBuilding
rdfs:label "New Mountbatten"^^xsd:string
is http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within of http://id.southampton.ac.uk/equipment/E10240
 
http://data.southampton.ac.uk/image-archive/equipment/raw/E10240-200640-P1000881.jpg
foaf:depicts http://id.southampton.ac.uk/equipment/E10240
is foaf:depiction of http://id.southampton.ac.uk/equipment/E10240
 
http://id.southampton.ac.uk/equipment/E10240#secondary_contact
rdf:type foaf:Person
is oo:contact of http://id.southampton.ac.uk/equipment/E10240
 
http://id.southampton.ac.uk/
rdf:type http://purl.org/vocab/aiiso/schema#Institution, http://www.w3.org/ns/org#FormalOrganization, http://www.w3.org/ns/org#Organization, foaf:Organization
rdfs:label "University of Southampton"^^xsd:string
is oo:formalOrganization of http://id.southampton.ac.uk/equipment/E10240
 
http://id.southampton.ac.uk/org/FP
rdf:type http://www.w3.org/ns/org#Organization
rdfs:label "School of Electronics & Computer Science"^^xsd:string
is oo:organizationPart of http://id.southampton.ac.uk/equipment/E10240
 
http://id.southampton.ac.uk/org/F7
rdf:type http://www.w3.org/ns/org#OrganizationalUnit, http://www.w3.org/ns/org#Organization
rdfs:label "Physical Sciences and Engineering"^^xsd:string
is oo:organizationPart of http://id.southampton.ac.uk/equipment/E10240
 
http://id.southampton.ac.uk/equipment/E10240#primary_contact
rdf:type foaf:Agent
foaf:name "LESSEY, MARK"^^xsd:string
is oo:primaryContact of http://id.southampton.ac.uk/equipment/E10240
 
http://id.southampton.ac.uk/facility/F10014
rdf:type oo:Facility
rdfs:label "Clean Rooms - Nanofabrication"^^xsd:string
is oo:relatedFacility of http://id.southampton.ac.uk/equipment/E10240
 
http://data.southampton.ac.uk/image-archive/equipment/100/E10240-200640-P1000881.jpg
foaf:depicts http://id.southampton.ac.uk/equipment/E10240
 
http://data.southampton.ac.uk/image-archive/equipment/200/E10240-200640-P1000881.jpg
foaf:depicts http://id.southampton.ac.uk/equipment/E10240
 
http://data.southampton.ac.uk/image-archive/equipment/300/E10240-200640-P1000881.jpg
foaf:depicts http://id.southampton.ac.uk/equipment/E10240
 
http://data.southampton.ac.uk/image-archive/equipment/400/E10240-200640-P1000881.jpg
foaf:depicts http://id.southampton.ac.uk/equipment/E10240
 
http://data.southampton.ac.uk/image-archive/equipment/50/E10240-200640-P1000881.jpg
foaf:depicts http://id.southampton.ac.uk/equipment/E10240
 
https://data.southampton.ac.uk/image-archive/equipment/100/E10240-200640-P1000881.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10240
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "133"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "100"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "0.75187969924812"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "4087"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/1000/E10240-200640-P1000881.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10240
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "1333"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "1000"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "0.75018754688672"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "160326"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/1600/E10240-200640-P1000881.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10240
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "2133"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "1600"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "0.75011720581341"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "367151"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/1920/E10240-200640-P1000881.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10240
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "2560"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "1920"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "0.75"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "514514"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/200/E10240-200640-P1000881.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10240
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "266"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "200"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "0.75187969924812"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "11179"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/220x220/E10240-200640-P1000881.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10240
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "220"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "220"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "10499"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/240x260/E10240-200640-P1000881.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10240
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "260"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "240"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "0.92307692307692"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "12617"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/300/E10240-200640-P1000881.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10240
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "400"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "300"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "0.75"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "21927"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/320x198/E10240-200640-P1000881.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10240
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "198"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "320"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.6161616161616"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "12219"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/400/E10240-200640-P1000881.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10240
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "533"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "400"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "0.75046904315197"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "35163"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/480x297/E10240-200640-P1000881.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10240
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "297"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "480"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.6161616161616"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "22827"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/50/E10240-200640-P1000881.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10240
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "66"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "50"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "0.75757575757576"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "1785"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/600/E10240-200640-P1000881.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10240
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "800"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "600"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "0.75"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "68323"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/800/E10240-200640-P1000881.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10240
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "1066"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "800"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "0.75046904315197"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "110003"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/800x600/E10240-200640-P1000881.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10240
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "600"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "800"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.3333333333333"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "62623"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/raw/E10240-200640-P1000881.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10240
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "4320"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "3240"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "0.75"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "5056309"^^xsd:integer
dcterms:thing http://example.org