→ rdf:type → oo:Equipment

→ rdfs:label → "Opt System 100 Metal Etcher"

→ oo:contact → http://id.southampton.ac.uk/equipment/E10240#secondary_contact

→ http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within → http://id.southampton.ac.uk/building/53

→ dcterms:description → "The etch mechanism of RIE is achieved by using the reactive gas plasma generated by strong RF source (13.56 MHz) to chemically ion etch the material of the samples. Depending on the process recipe, the material⿿s etched profile can achieve high anisotropy. The DP06 RIE80+ system is configured for multimaterial etching like silica, silicon nitride, polymer, III-V based, semiconductor-metal, polysilicon and amorphous silicon."

→ skos:notation → "E10240"^^http://id.southampton.ac.uk/ns/equipment-code-scheme

→ oo:formalOrganization → http://id.southampton.ac.uk/

→ dc:description → "The etch mechanism of RIE is achieved by using the reactive gas plasma generated by strong RF source (13.56 MHz) to chemically ion etch the material of the samples. Depending on the process recipe, the material⿿s etched profile can achieve high anisotropy. The DP06 RIE80+ system is configured for multimaterial etching like silica, silicon nitride, polymer, III-V based, semiconductor-metal, polysilicon and amorphous silicon."

→ rdfs:comment → "The etch mechanism of RIE is achieved by using the reactive gas plasma generated by strong RF source (13.56 MHz) to chemically ion etch the material of the samples. Depending on the process recipe, the material⿿s etched profile can achieve high anisotropy. The DP06 RIE80+ system is configured for multimaterial etching like silica, silicon nitride, polymer, III-V based, semiconductor-metal, polysilicon and amorphous silicon."

→ oo:organizationPart → http://id.southampton.ac.uk/org/F7, http://id.southampton.ac.uk/org/FP

→ oo:primaryContact → http://id.southampton.ac.uk/equipment/E10240#primary_contact

→ oo:relatedFacility → http://id.southampton.ac.uk/facility/F10014

→ foaf:page → http://www.southampton-nanofab.com/fabrication/dryEtch.php

→ foaf:depiction → http://data.southampton.ac.uk/image-archive/equipment/raw/E10240-200640-P1000881.jpg

← is foaf:depicts of ← http://data.southampton.ac.uk/image-archive/equipment/raw/E10240-200640-P1000881.jpg, http://data.southampton.ac.uk/image-archive/equipment/200/E10240-200640-P1000881.jpg, http://data.southampton.ac.uk/image-archive/equipment/100/E10240-200640-P1000881.jpg, http://data.southampton.ac.uk/image-archive/equipment/50/E10240-200640-P1000881.jpg, http://data.southampton.ac.uk/image-archive/equipment/400/E10240-200640-P1000881.jpg, http://data.southampton.ac.uk/image-archive/equipment/300/E10240-200640-P1000881.jpg, https://data.southampton.ac.uk/image-archive/equipment/raw/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/1000/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/800/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/600/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/400/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/300/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/200/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/100/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/50/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/1920/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/1600/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/800x600/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/480x297/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/320x198/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/240x260/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/220x220/E10240-200640-P1000881.JPG

→ rdf:type → foaf:Person

← is oo:contact of ← http://id.southampton.ac.uk/equipment/E10240

→ rdf:type → http://vocab.deri.ie/rooms#Building, http://id.southampton.ac.uk/ns/UoSBuilding

→ rdfs:label → "New Mountbatten"

← is http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within of ← http://id.southampton.ac.uk/equipment/E10240

→ rdf:type → http://www.w3.org/ns/org#Organization, http://purl.org/vocab/aiiso/schema#Institution, http://www.w3.org/ns/org#FormalOrganization, foaf:Organization

→ rdfs:label → "University of Southampton"

← is oo:formalOrganization of ← http://id.southampton.ac.uk/equipment/E10240

→ rdf:type → http://www.w3.org/ns/org#OrganizationalUnit, http://www.w3.org/ns/org#Organization

→ rdfs:label → "Physical Sciences and Engineering"

← is oo:organizationPart of ← http://id.southampton.ac.uk/equipment/E10240

→ rdf:type → http://www.w3.org/ns/org#Organization

→ rdfs:label → "School of Electronics & Computer Science"

← is oo:organizationPart of ← http://id.southampton.ac.uk/equipment/E10240

→ rdf:type → foaf:Agent

→ foaf:name → "LESSEY, MARK"

← is oo:primaryContact of ← http://id.southampton.ac.uk/equipment/E10240

→ rdf:type → oo:Facility

→ rdfs:label → "Clean Rooms - Nanofabrication"

← is oo:relatedFacility of ← http://id.southampton.ac.uk/equipment/E10240

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10240

← is foaf:depiction of ← http://id.southampton.ac.uk/equipment/E10240

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10240

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10240

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10240

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10240

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10240

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10240

→ rdf:type → foaf:Image

→ dcterms:format → http://purl.org/xtypes/Format-JPEG

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height → "4320"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width → "3240"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize → "5056309"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio → "0.75"^^xsd:float

← is dcterms:isVersionOf of ← https://data.southampton.ac.uk/image-archive/equipment/1000/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/800/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/600/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/400/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/300/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/200/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/100/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/50/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/1920/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/1600/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/800x600/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/480x297/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/320x198/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/240x260/E10240-200640-P1000881.JPG, https://data.southampton.ac.uk/image-archive/equipment/220x220/E10240-200640-P1000881.JPG

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10240

→ rdf:type → foaf:Image

→ dcterms:format → http://purl.org/xtypes/Format-JPEG

→ dcterms:isVersionOf → https://data.southampton.ac.uk/image-archive/equipment/raw/E10240-200640-P1000881.JPG

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height → "1333"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width → "1000"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize → "160313"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio → "0.75018754688672"^^xsd:float

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10240

→ rdf:type → foaf:Image

→ dcterms:format → http://purl.org/xtypes/Format-JPEG

→ dcterms:isVersionOf → https://data.southampton.ac.uk/image-archive/equipment/raw/E10240-200640-P1000881.JPG

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height → "1066"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width → "800"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize → "110051"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio → "0.75046904315197"^^xsd:float

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10240

→ rdf:type → foaf:Image

→ dcterms:format → http://purl.org/xtypes/Format-JPEG

→ dcterms:isVersionOf → https://data.southampton.ac.uk/image-archive/equipment/raw/E10240-200640-P1000881.JPG

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height → "800"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width → "600"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize → "68320"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio → "0.75"^^xsd:float

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10240

→ rdf:type → foaf:Image

→ dcterms:format → http://purl.org/xtypes/Format-JPEG

→ dcterms:isVersionOf → https://data.southampton.ac.uk/image-archive/equipment/raw/E10240-200640-P1000881.JPG

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height → "533"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width → "400"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize → "35180"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio → "0.75046904315197"^^xsd:float

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10240

→ rdf:type → foaf:Image

→ dcterms:format → http://purl.org/xtypes/Format-JPEG

→ dcterms:isVersionOf → https://data.southampton.ac.uk/image-archive/equipment/raw/E10240-200640-P1000881.JPG

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height → "400"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width → "300"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize → "21920"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio → "0.75"^^xsd:float

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10240

→ rdf:type → foaf:Image

→ dcterms:format → http://purl.org/xtypes/Format-JPEG

→ dcterms:isVersionOf → https://data.southampton.ac.uk/image-archive/equipment/raw/E10240-200640-P1000881.JPG

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height → "266"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width → "200"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize → "11182"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio → "0.75187969924812"^^xsd:float

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10240

→ rdf:type → foaf:Image

→ dcterms:format → http://purl.org/xtypes/Format-JPEG

→ dcterms:isVersionOf → https://data.southampton.ac.uk/image-archive/equipment/raw/E10240-200640-P1000881.JPG

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height → "133"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width → "100"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize → "4084"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio → "0.75187969924812"^^xsd:float

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10240

→ rdf:type → foaf:Image

→ dcterms:format → http://purl.org/xtypes/Format-JPEG

→ dcterms:isVersionOf → https://data.southampton.ac.uk/image-archive/equipment/raw/E10240-200640-P1000881.JPG

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height → "66"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width → "50"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize → "1790"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio → "0.75757575757576"^^xsd:float

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10240

→ rdf:type → foaf:Image

→ dcterms:format → http://purl.org/xtypes/Format-JPEG

→ dcterms:isVersionOf → https://data.southampton.ac.uk/image-archive/equipment/raw/E10240-200640-P1000881.JPG

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height → "2560"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width → "1920"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize → "514372"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio → "0.75"^^xsd:float

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10240

→ rdf:type → foaf:Image

→ dcterms:format → http://purl.org/xtypes/Format-JPEG

→ dcterms:isVersionOf → https://data.southampton.ac.uk/image-archive/equipment/raw/E10240-200640-P1000881.JPG

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height → "2133"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width → "1600"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize → "367130"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio → "0.75011720581341"^^xsd:float

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10240

→ rdf:type → foaf:Image

→ dcterms:format → http://purl.org/xtypes/Format-JPEG

→ dcterms:isVersionOf → https://data.southampton.ac.uk/image-archive/equipment/raw/E10240-200640-P1000881.JPG

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height → "600"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width → "800"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize → "62621"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio → "1.3333333333333"^^xsd:float

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10240

→ rdf:type → foaf:Image

→ dcterms:format → http://purl.org/xtypes/Format-JPEG

→ dcterms:isVersionOf → https://data.southampton.ac.uk/image-archive/equipment/raw/E10240-200640-P1000881.JPG

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height → "297"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width → "480"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize → "22824"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio → "1.6161616161616"^^xsd:float

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10240

→ rdf:type → foaf:Image

→ dcterms:format → http://purl.org/xtypes/Format-JPEG

→ dcterms:isVersionOf → https://data.southampton.ac.uk/image-archive/equipment/raw/E10240-200640-P1000881.JPG

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height → "198"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width → "320"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize → "12220"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio → "1.6161616161616"^^xsd:float

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10240

→ rdf:type → foaf:Image

→ dcterms:format → http://purl.org/xtypes/Format-JPEG

→ dcterms:isVersionOf → https://data.southampton.ac.uk/image-archive/equipment/raw/E10240-200640-P1000881.JPG

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height → "260"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width → "240"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize → "12606"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio → "0.92307692307692"^^xsd:float

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10240

→ rdf:type → foaf:Image

→ dcterms:format → http://purl.org/xtypes/Format-JPEG

→ dcterms:isVersionOf → https://data.southampton.ac.uk/image-archive/equipment/raw/E10240-200640-P1000881.JPG

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height → "220"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width → "220"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize → "10490"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio → "1"^^xsd:float