→ rdfs:label → "EVG620 Top Side Mask Aligner"^^xsd:string
→ dcterms:description → "The EVG 620 provides high precision manual alignment on wafers. This is the main maks aligner of the cleanroom and can handle wafer sizes up to 150mm.␣␣Exposure can be performed in hard, soft and proximity modes."^^xsd:string
→ skos:notation → "E10244"^^http://id.southampton.ac.uk/ns/equipment-code-scheme
→ rdfs:comment → "The EVG 620 provides high precision manual alignment on wafers. This is the main maks aligner of the cleanroom and can handle wafer sizes up to 150mm.␣␣Exposure can be performed in hard, soft and proximity modes."^^xsd:string
→ dc:description → "The EVG 620 provides high precision manual alignment on wafers. This is the main maks aligner of the cleanroom and can handle wafer sizes up to 150mm.␣␣Exposure can be performed in hard, soft and proximity modes."^^xsd:string
← is
foaf:depicts of
← https://data.southampton.ac.uk/image-archive/equipment/100/E10244-200660-P1000830.JPG,
https://data.southampton.ac.uk/image-archive/equipment/1000/E10244-200660-P1000830.JPG,
https://data.southampton.ac.uk/image-archive/equipment/1600/E10244-200660-P1000830.JPG,
https://data.southampton.ac.uk/image-archive/equipment/1920/E10244-200660-P1000830.JPG,
https://data.southampton.ac.uk/image-archive/equipment/200/E10244-200660-P1000830.JPG,
https://data.southampton.ac.uk/image-archive/equipment/220x220/E10244-200660-P1000830.JPG,
https://data.southampton.ac.uk/image-archive/equipment/240x260/E10244-200660-P1000830.JPG,
https://data.southampton.ac.uk/image-archive/equipment/300/E10244-200660-P1000830.JPG,
https://data.southampton.ac.uk/image-archive/equipment/320x198/E10244-200660-P1000830.JPG,
https://data.southampton.ac.uk/image-archive/equipment/400/E10244-200660-P1000830.JPG,
https://data.southampton.ac.uk/image-archive/equipment/480x297/E10244-200660-P1000830.JPG,
https://data.southampton.ac.uk/image-archive/equipment/50/E10244-200660-P1000830.JPG,
https://data.southampton.ac.uk/image-archive/equipment/600/E10244-200660-P1000830.JPG,
https://data.southampton.ac.uk/image-archive/equipment/800/E10244-200660-P1000830.JPG,
https://data.southampton.ac.uk/image-archive/equipment/800x600/E10244-200660-P1000830.JPG,
https://data.southampton.ac.uk/image-archive/equipment/raw/E10244-200660-P1000830.JPG
→ rdfs:label → "University of Southampton"^^xsd:string
→ rdfs:label → "School of Electronics & Computer Science"^^xsd:string
→ rdfs:label → "Physical Sciences and Engineering"^^xsd:string
→ rdfs:label → "Clean Rooms - Nanofabrication"^^xsd:string