http://id.southampton.ac.uk/equipment/E10255
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foaf:page http://www.southampton-nanofab.com/fabrication/cleanroomEquipment.php
dc:description "BAK600 e-gun/thermal evaporator is configured for non-reactive deposition of metal contact stacks , metal masking layers, some dielectrics, ITO."^^xsd:string
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http://id.southampton.ac.uk/building/17
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