http://id.southampton.ac.uk/equipment/E10263
rdf:type oo:Equipment
rdfs:label "Evaporator Gun"^^xsd:string
dcterms:description " LAB700 e-gun evaporator incorporates 2e-guns each with a 5xcrucible plate. is configured for reactive ion assisted deposition of dielectrics, high precision lift off, variable angle deposition, cryogenic deposition"^^xsd:string
skos:notation "E10263"^^http://id.southampton.ac.uk/ns/equipment-code-scheme
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rdfs:comment " LAB700 e-gun evaporator incorporates 2e-guns each with a 5xcrucible plate. is configured for reactive ion assisted deposition of dielectrics, high precision lift off, variable angle deposition, cryogenic deposition"^^xsd:string
oo:contact http://id.southampton.ac.uk/equipment/E10263#secondary_contact
foaf:page http://www.southampton-nanofab.com/fabrication/cleanroomEquipment.php
dc:description " LAB700 e-gun evaporator incorporates 2e-guns each with a 5xcrucible plate. is configured for reactive ion assisted deposition of dielectrics, high precision lift off, variable angle deposition, cryogenic deposition"^^xsd:string
oo:formalOrganization http://id.southampton.ac.uk/
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oo:primaryContact http://id.southampton.ac.uk/equipment/E10263#primary_contact
oo:relatedFacility http://id.southampton.ac.uk/facility/F10014
 
http://id.southampton.ac.uk/building/53
rdf:type http://vocab.deri.ie/rooms#Building, http://id.southampton.ac.uk/ns/UoSBuilding
rdfs:label "New Mountbatten"^^xsd:string
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http://id.southampton.ac.uk/
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rdfs:label "University of Southampton"^^xsd:string
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rdfs:label "Physical Sciences and Engineering"^^xsd:string
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rdf:type foaf:Agent
foaf:name "LESSEY, MARK"^^xsd:string
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rdf:type oo:Facility
rdfs:label "Clean Rooms - Nanofabrication"^^xsd:string
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