→ dcterms:description → " LAB700 e-gun evaporator incorporates 2e-guns each with a 5xcrucible plate. is configured for reactive ion assisted deposition of dielectrics, high precision lift off, variable angle deposition, cryogenic deposition"^^xsd:string
→ skos:notation → "E10263"^^http://id.southampton.ac.uk/ns/equipment-code-scheme
→ rdfs:comment → " LAB700 e-gun evaporator incorporates 2e-guns each with a 5xcrucible plate. is configured for reactive ion assisted deposition of dielectrics, high precision lift off, variable angle deposition, cryogenic deposition"^^xsd:string
→ dc:description → " LAB700 e-gun evaporator incorporates 2e-guns each with a 5xcrucible plate. is configured for reactive ion assisted deposition of dielectrics, high precision lift off, variable angle deposition, cryogenic deposition"^^xsd:string
→ rdfs:label → "University of Southampton"^^xsd:string
→ rdfs:label → "School of Electronics & Computer Science"^^xsd:string
→ rdfs:label → "Physical Sciences and Engineering"^^xsd:string
→ rdfs:label → "Clean Rooms - Nanofabrication"^^xsd:string