http://id.southampton.ac.uk/equipment/E10276
rdf:type oo:Equipment
rdfs:label "Theta probe PARXPS system"^^xsd:string
dcterms:description "Parallel angle-resolved XPS (PARXPS) analysis without sample tilting, ability to collect angle-resolved XPS spectra over a 60 degree angular range, in parallel, without tilting the sample and allows the instrument to characterise ultra-thin films non-destructively, allows composition depth profiling using an integrated etching module, X-ray monochrmator with user-selectable spot size in the range 15um to 400um,. Ability to handle large or multiple samples, CCD sample alignment microscope perpendicular to the sample surface."^^xsd:string
skos:notation "E10276"^^http://id.southampton.ac.uk/ns/equipment-code-scheme
http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within http://id.southampton.ac.uk/building/53
rdfs:comment "Parallel angle-resolved XPS (PARXPS) analysis without sample tilting, ability to collect angle-resolved XPS spectra over a 60 degree angular range, in parallel, without tilting the sample and allows the instrument to characterise ultra-thin films non-destructively, allows composition depth profiling using an integrated etching module, X-ray monochrmator with user-selectable spot size in the range 15um to 400um,. Ability to handle large or multiple samples, CCD sample alignment microscope perpendicular to the sample surface."^^xsd:string
oo:contact http://id.southampton.ac.uk/equipment/E10276#secondary_contact
foaf:page http://www.southampton-nanofab.com/characterisation/dcivProbeStation.php
dc:description "Parallel angle-resolved XPS (PARXPS) analysis without sample tilting, ability to collect angle-resolved XPS spectra over a 60 degree angular range, in parallel, without tilting the sample and allows the instrument to characterise ultra-thin films non-destructively, allows composition depth profiling using an integrated etching module, X-ray monochrmator with user-selectable spot size in the range 15um to 400um,. Ability to handle large or multiple samples, CCD sample alignment microscope perpendicular to the sample surface."^^xsd:string
oo:formalOrganization http://id.southampton.ac.uk/
oo:organizationPart http://id.southampton.ac.uk/org/FP, http://id.southampton.ac.uk/org/F7
oo:primaryContact http://id.southampton.ac.uk/equipment/E10276#primary_contact
oo:relatedFacility http://id.southampton.ac.uk/facility/F10014
 
http://id.southampton.ac.uk/building/53
rdf:type http://vocab.deri.ie/rooms#Building, http://id.southampton.ac.uk/ns/UoSBuilding
rdfs:label "New Mountbatten"^^xsd:string
is http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within of http://id.southampton.ac.uk/equipment/E10276
 
http://id.southampton.ac.uk/equipment/E10276#secondary_contact
rdf:type foaf:Person
is oo:contact of http://id.southampton.ac.uk/equipment/E10276
 
http://id.southampton.ac.uk/
rdf:type http://purl.org/vocab/aiiso/schema#Institution, http://www.w3.org/ns/org#FormalOrganization, http://www.w3.org/ns/org#Organization, foaf:Organization
rdfs:label "University of Southampton"^^xsd:string
is oo:formalOrganization of http://id.southampton.ac.uk/equipment/E10276
 
http://id.southampton.ac.uk/org/FP
rdf:type http://www.w3.org/ns/org#Organization
rdfs:label "School of Electronics & Computer Science"^^xsd:string
is oo:organizationPart of http://id.southampton.ac.uk/equipment/E10276
 
http://id.southampton.ac.uk/org/F7
rdf:type http://www.w3.org/ns/org#OrganizationalUnit, http://www.w3.org/ns/org#Organization
rdfs:label "Physical Sciences and Engineering"^^xsd:string
is oo:organizationPart of http://id.southampton.ac.uk/equipment/E10276
 
http://id.southampton.ac.uk/equipment/E10276#primary_contact
rdf:type foaf:Agent
foaf:name "LESSEY, MARK"^^xsd:string
is oo:primaryContact of http://id.southampton.ac.uk/equipment/E10276
 
http://id.southampton.ac.uk/facility/F10014
rdf:type oo:Facility
rdfs:label "Clean Rooms - Nanofabrication"^^xsd:string
is oo:relatedFacility of http://id.southampton.ac.uk/equipment/E10276