http://id.southampton.ac.uk/equipment/E10276
→ rdf:type → oo:Equipment
→ rdfs:label → "Theta probe PARXPS system"
→ oo:contact → http://id.southampton.ac.uk/equipment/E10276#secondary_contact
→ http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within → http://id.southampton.ac.uk/building/53
→ dcterms:description → "Parallel angle-resolved XPS (PARXPS) analysis without sample tilting, ability to collect angle-resolved XPS spectra over a 60 degree angular range, in parallel, without tilting the sample and allows the instrument to characterise ultra-thin films non-destructively, allows composition depth profiling using an integrated etching module, X-ray monochrmator with user-selectable spot size in the range 15um to 400um,. Ability to handle large or multiple samples, CCD sample alignment microscope perpendicular to the sample surface."
→ skos:notation → "E10276"^^http://id.southampton.ac.uk/ns/equipment-code-scheme
→ oo:formalOrganization → http://id.southampton.ac.uk/
→ dc:description → "Parallel angle-resolved XPS (PARXPS) analysis without sample tilting, ability to collect angle-resolved XPS spectra over a 60 degree angular range, in parallel, without tilting the sample and allows the instrument to characterise ultra-thin films non-destructively, allows composition depth profiling using an integrated etching module, X-ray monochrmator with user-selectable spot size in the range 15um to 400um,. Ability to handle large or multiple samples, CCD sample alignment microscope perpendicular to the sample surface."
→ rdfs:comment → "Parallel angle-resolved XPS (PARXPS) analysis without sample tilting, ability to collect angle-resolved XPS spectra over a 60 degree angular range, in parallel, without tilting the sample and allows the instrument to characterise ultra-thin films non-destructively, allows composition depth profiling using an integrated etching module, X-ray monochrmator with user-selectable spot size in the range 15um to 400um,. Ability to handle large or multiple samples, CCD sample alignment microscope perpendicular to the sample surface."
→ oo:organizationPart → http://id.southampton.ac.uk/org/F7, http://id.southampton.ac.uk/org/FP
→ oo:primaryContact → http://id.southampton.ac.uk/equipment/E10276#primary_contact
→ oo:relatedFacility → http://id.southampton.ac.uk/facility/F10014
→ foaf:page → http://www.southampton-nanofab.com/characterisation/dcivProbeStation.php
 
http://id.southampton.ac.uk/equipment/E10276#secondary_contact
→ rdf:type → foaf:Person
← is oo:contact of ← http://id.southampton.ac.uk/equipment/E10276
 
http://id.southampton.ac.uk/building/53
→ rdf:type → http://vocab.deri.ie/rooms#Building, http://id.southampton.ac.uk/ns/UoSBuilding
→ rdfs:label → "New Mountbatten"
← is http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within of ← http://id.southampton.ac.uk/equipment/E10276
 
http://id.southampton.ac.uk/
→ rdf:type → http://www.w3.org/ns/org#Organization, http://purl.org/vocab/aiiso/schema#Institution, http://www.w3.org/ns/org#FormalOrganization, foaf:Organization
→ rdfs:label → "University of Southampton"
← is oo:formalOrganization of ← http://id.southampton.ac.uk/equipment/E10276
 
http://id.southampton.ac.uk/org/F7
→ rdf:type → http://www.w3.org/ns/org#OrganizationalUnit, http://www.w3.org/ns/org#Organization
→ rdfs:label → "Physical Sciences and Engineering"
← is oo:organizationPart of ← http://id.southampton.ac.uk/equipment/E10276
 
http://id.southampton.ac.uk/org/FP
→ rdf:type → http://www.w3.org/ns/org#Organization
→ rdfs:label → "School of Electronics & Computer Science"
← is oo:organizationPart of ← http://id.southampton.ac.uk/equipment/E10276
 
http://id.southampton.ac.uk/equipment/E10276#primary_contact
→ rdf:type → foaf:Agent
→ foaf:name → "LESSEY, MARK"
← is oo:primaryContact of ← http://id.southampton.ac.uk/equipment/E10276
 
http://id.southampton.ac.uk/facility/F10014
→ rdf:type → oo:Facility
→ rdfs:label → "Clean Rooms - Nanofabrication"
← is oo:relatedFacility of ← http://id.southampton.ac.uk/equipment/E10276