http://id.southampton.ac.uk/equipment/E10277
rdf:type oo:Equipment
rdfs:label "Polytec MSA-400 Micro System Analyzer"
oo:contact http://id.southampton.ac.uk/equipment/E10277#secondary_contact
http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within http://id.southampton.ac.uk/building/53
dcterms:description "3D MEMS dynamics and topography tester. Scanning laser vibrometry for out of plane vibrations up to 20MHz, stroboscopic video microscopy for in-plane motion & vibrations, white light interferometry for surface topography␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣http://data.southampton.ac.uk/equipment/E10277.html"
skos:notation "E10277"^^http://id.southampton.ac.uk/ns/equipment-code-scheme
oo:formalOrganization http://id.southampton.ac.uk/
dc:description "3D MEMS dynamics and topography tester. Scanning laser vibrometry for out of plane vibrations up to 20MHz, stroboscopic video microscopy for in-plane motion & vibrations, white light interferometry for surface topography␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣http://data.southampton.ac.uk/equipment/E10277.html"
rdfs:comment "3D MEMS dynamics and topography tester. Scanning laser vibrometry for out of plane vibrations up to 20MHz, stroboscopic video microscopy for in-plane motion & vibrations, white light interferometry for surface topography␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣http://data.southampton.ac.uk/equipment/E10277.html"
oo:organizationPart http://id.southampton.ac.uk/org/F7, http://id.southampton.ac.uk/org/FP
oo:primaryContact http://id.southampton.ac.uk/equipment/E10277#primary_contact
oo:relatedFacility http://id.southampton.ac.uk/facility/F10014
foaf:page http://www.southampton-nanofab.com/characterisation/memsTester.php
 
http://id.southampton.ac.uk/equipment/E10277#secondary_contact
rdf:type foaf:Person
is oo:contact of http://id.southampton.ac.uk/equipment/E10277
 
http://id.southampton.ac.uk/building/53
rdf:type http://vocab.deri.ie/rooms#Building, http://id.southampton.ac.uk/ns/UoSBuilding
rdfs:label "New Mountbatten"
is http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within of http://id.southampton.ac.uk/equipment/E10277
 
http://id.southampton.ac.uk/
rdf:type http://www.w3.org/ns/org#Organization, http://purl.org/vocab/aiiso/schema#Institution, http://www.w3.org/ns/org#FormalOrganization, foaf:Organization
rdfs:label "University of Southampton"
is oo:formalOrganization of http://id.southampton.ac.uk/equipment/E10277
 
http://id.southampton.ac.uk/org/F7
rdf:type http://www.w3.org/ns/org#OrganizationalUnit, http://www.w3.org/ns/org#Organization
rdfs:label "Physical Sciences and Engineering"
is oo:organizationPart of http://id.southampton.ac.uk/equipment/E10277
 
http://id.southampton.ac.uk/org/FP
rdf:type http://www.w3.org/ns/org#Organization
rdfs:label "School of Electronics & Computer Science"
is oo:organizationPart of http://id.southampton.ac.uk/equipment/E10277
 
http://id.southampton.ac.uk/equipment/E10277#primary_contact
rdf:type foaf:Agent
foaf:name "CHONG, HAROLD"
is oo:primaryContact of http://id.southampton.ac.uk/equipment/E10277
 
http://id.southampton.ac.uk/facility/F10014
rdf:type oo:Facility
rdfs:label "Clean Rooms - Nanofabrication"
is oo:relatedFacility of http://id.southampton.ac.uk/equipment/E10277