http://id.southampton.ac.uk/equipment/E10277
→ rdf:type → oo:Equipment
→ rdfs:label → "Polytec MSA-400 Micro System Analyzer"^^xsd:string
→ dcterms:description → "3D MEMS dynamics and topography tester. Scanning laser vibrometry for out of plane vibrations up to 20MHz, stroboscopic video microscopy for in-plane motion & vibrations, white light interferometry for surface topography␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣http://data.southampton.ac.uk/equipment/E10277.html"^^xsd:string
→ skos:notation → "E10277"^^http://id.southampton.ac.uk/ns/equipment-code-scheme
→ http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within → http://id.southampton.ac.uk/building/53
→ rdfs:comment → "3D MEMS dynamics and topography tester. Scanning laser vibrometry for out of plane vibrations up to 20MHz, stroboscopic video microscopy for in-plane motion & vibrations, white light interferometry for surface topography␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣http://data.southampton.ac.uk/equipment/E10277.html"^^xsd:string
→ oo:contact → http://id.southampton.ac.uk/equipment/E10277#secondary_contact
→ foaf:page → http://www.southampton-nanofab.com/characterisation/memsTester.php
→ dc:description → "3D MEMS dynamics and topography tester. Scanning laser vibrometry for out of plane vibrations up to 20MHz, stroboscopic video microscopy for in-plane motion & vibrations, white light interferometry for surface topography␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣␣http://data.southampton.ac.uk/equipment/E10277.html"^^xsd:string
→ oo:formalOrganization → http://id.southampton.ac.uk/
→ oo:organizationPart → http://id.southampton.ac.uk/org/FP, http://id.southampton.ac.uk/org/F7
→ oo:primaryContact → http://id.southampton.ac.uk/equipment/E10277#primary_contact
→ oo:relatedFacility → http://id.southampton.ac.uk/facility/F10014
 
http://id.southampton.ac.uk/building/53
→ rdf:type → http://vocab.deri.ie/rooms#Building, http://id.southampton.ac.uk/ns/UoSBuilding
→ rdfs:label → "New Mountbatten"^^xsd:string
← is http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within of ← http://id.southampton.ac.uk/equipment/E10277
 
http://id.southampton.ac.uk/equipment/E10277#secondary_contact
→ rdf:type → foaf:Person
← is oo:contact of ← http://id.southampton.ac.uk/equipment/E10277
 
http://id.southampton.ac.uk/
→ rdf:type → http://purl.org/vocab/aiiso/schema#Institution, http://www.w3.org/ns/org#FormalOrganization, http://www.w3.org/ns/org#Organization, foaf:Organization
→ rdfs:label → "University of Southampton"^^xsd:string
← is oo:formalOrganization of ← http://id.southampton.ac.uk/equipment/E10277
 
http://id.southampton.ac.uk/org/FP
→ rdf:type → http://www.w3.org/ns/org#Organization
→ rdfs:label → "School of Electronics & Computer Science"^^xsd:string
← is oo:organizationPart of ← http://id.southampton.ac.uk/equipment/E10277
 
http://id.southampton.ac.uk/org/F7
→ rdf:type → http://www.w3.org/ns/org#OrganizationalUnit, http://www.w3.org/ns/org#Organization
→ rdfs:label → "Physical Sciences and Engineering"^^xsd:string
← is oo:organizationPart of ← http://id.southampton.ac.uk/equipment/E10277
 
http://id.southampton.ac.uk/equipment/E10277#primary_contact
→ rdf:type → foaf:Agent
→ foaf:name → "CHONG, HAROLD"^^xsd:string
← is oo:primaryContact of ← http://id.southampton.ac.uk/equipment/E10277
 
http://id.southampton.ac.uk/facility/F10014
→ rdf:type → oo:Facility
→ rdfs:label → "Clean Rooms - Nanofabrication"^^xsd:string
← is oo:relatedFacility of ← http://id.southampton.ac.uk/equipment/E10277