http://id.southampton.ac.uk/equipment/E10284

→ rdf:type → oo:Equipment

→ rdfs:label → "Tempress Clean Furnace Stack"^^xsd:string

→ dcterms:description → "150mm wafers, automated loading, dru oxidation 600-1150C, wet oxidation 600-1150C, anneal 600-1150C, temperature accuracy +/- 1C, 25 wafer boats."^^xsd:string

→ skos:notation → "E10284"^^http://id.southampton.ac.uk/ns/equipment-code-scheme

→ http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within → http://id.southampton.ac.uk/building/53

→ rdfs:comment → "150mm wafers, automated loading, dru oxidation 600-1150C, wet oxidation 600-1150C, anneal 600-1150C, temperature accuracy +/- 1C, 25 wafer boats."^^xsd:string

→ oo:contact → http://id.southampton.ac.uk/equipment/E10284#secondary_contact

→ foaf:page → http://www.southampton-nanofab.com/fabrication/anneal.php

→ dc:description → "150mm wafers, automated loading, dru oxidation 600-1150C, wet oxidation 600-1150C, anneal 600-1150C, temperature accuracy +/- 1C, 25 wafer boats."^^xsd:string

→ oo:formalOrganization → http://id.southampton.ac.uk/

→ oo:organizationPart → http://id.southampton.ac.uk/org/FP, http://id.southampton.ac.uk/org/F7

→ oo:primaryContact → http://id.southampton.ac.uk/equipment/E10284#primary_contact

→ oo:relatedFacility → http://id.southampton.ac.uk/facility/F10014

http://id.southampton.ac.uk/building/53

→ rdf:type → http://vocab.deri.ie/rooms#Building, http://id.southampton.ac.uk/ns/UoSBuilding

→ rdfs:label → "New Mountbatten"^^xsd:string

← is http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within of ← http://id.southampton.ac.uk/equipment/E10284

http://id.southampton.ac.uk/equipment/E10284#secondary_contact

→ rdf:type → foaf:Person

← is oo:contact of ← http://id.southampton.ac.uk/equipment/E10284

http://id.southampton.ac.uk/

→ rdf:type → http://purl.org/vocab/aiiso/schema#Institution, http://www.w3.org/ns/org#FormalOrganization, http://www.w3.org/ns/org#Organization, foaf:Organization

→ rdfs:label → "University of Southampton"^^xsd:string

← is oo:formalOrganization of ← http://id.southampton.ac.uk/equipment/E10284

http://id.southampton.ac.uk/org/FP

→ rdf:type → http://www.w3.org/ns/org#Organization

→ rdfs:label → "School of Electronics & Computer Science"^^xsd:string

← is oo:organizationPart of ← http://id.southampton.ac.uk/equipment/E10284

http://id.southampton.ac.uk/org/F7

→ rdf:type → http://www.w3.org/ns/org#OrganizationalUnit, http://www.w3.org/ns/org#Organization

→ rdfs:label → "Physical Sciences and Engineering"^^xsd:string

← is oo:organizationPart of ← http://id.southampton.ac.uk/equipment/E10284

http://id.southampton.ac.uk/equipment/E10284#primary_contact

→ rdf:type → foaf:Agent

→ foaf:name → "ANTENEY, IAIN"^^xsd:string

← is oo:primaryContact of ← http://id.southampton.ac.uk/equipment/E10284

http://id.southampton.ac.uk/facility/F10014

→ rdf:type → oo:Facility

→ rdfs:label → "Clean Rooms - Nanofabrication"^^xsd:string

← is oo:relatedFacility of ← http://id.southampton.ac.uk/equipment/E10284