http://id.southampton.ac.uk/equipment/E10284

→ rdf:type → oo:Equipment

→ rdfs:label → "Tempress Clean Furnace Stack"

→ oo:contact → http://id.southampton.ac.uk/equipment/E10284#secondary_contact

→ http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within → http://id.southampton.ac.uk/building/53

→ dcterms:description → "150mm wafers, automated loading, dru oxidation 600-1150C, wet oxidation 600-1150C, anneal 600-1150C, temperature accuracy +/- 1C, 25 wafer boats."

→ skos:notation → "E10284"^^http://id.southampton.ac.uk/ns/equipment-code-scheme

→ oo:formalOrganization → http://id.southampton.ac.uk/

→ dc:description → "150mm wafers, automated loading, dru oxidation 600-1150C, wet oxidation 600-1150C, anneal 600-1150C, temperature accuracy +/- 1C, 25 wafer boats."

→ rdfs:comment → "150mm wafers, automated loading, dru oxidation 600-1150C, wet oxidation 600-1150C, anneal 600-1150C, temperature accuracy +/- 1C, 25 wafer boats."

→ oo:organizationPart → http://id.southampton.ac.uk/org/F7, http://id.southampton.ac.uk/org/FP

→ oo:primaryContact → http://id.southampton.ac.uk/equipment/E10284#primary_contact

→ oo:relatedFacility → http://id.southampton.ac.uk/facility/F10014

→ foaf:page → http://www.southampton-nanofab.com/fabrication/anneal.php

http://id.southampton.ac.uk/equipment/E10284#secondary_contact

→ rdf:type → foaf:Person

← is oo:contact of ← http://id.southampton.ac.uk/equipment/E10284

http://id.southampton.ac.uk/building/53

→ rdf:type → http://vocab.deri.ie/rooms#Building, http://id.southampton.ac.uk/ns/UoSBuilding

→ rdfs:label → "New Mountbatten"

← is http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within of ← http://id.southampton.ac.uk/equipment/E10284

http://id.southampton.ac.uk/

→ rdf:type → http://www.w3.org/ns/org#Organization, http://purl.org/vocab/aiiso/schema#Institution, http://www.w3.org/ns/org#FormalOrganization, foaf:Organization

→ rdfs:label → "University of Southampton"

← is oo:formalOrganization of ← http://id.southampton.ac.uk/equipment/E10284

http://id.southampton.ac.uk/org/F7

→ rdf:type → http://www.w3.org/ns/org#OrganizationalUnit, http://www.w3.org/ns/org#Organization

→ rdfs:label → "Physical Sciences and Engineering"

← is oo:organizationPart of ← http://id.southampton.ac.uk/equipment/E10284

http://id.southampton.ac.uk/org/FP

→ rdf:type → http://www.w3.org/ns/org#Organization

→ rdfs:label → "School of Electronics & Computer Science"

← is oo:organizationPart of ← http://id.southampton.ac.uk/equipment/E10284

http://id.southampton.ac.uk/equipment/E10284#primary_contact

→ rdf:type → foaf:Agent

→ foaf:name → "ANTENEY, IAIN"

← is oo:primaryContact of ← http://id.southampton.ac.uk/equipment/E10284

http://id.southampton.ac.uk/facility/F10014

→ rdf:type → oo:Facility

→ rdfs:label → "Clean Rooms - Nanofabrication"

← is oo:relatedFacility of ← http://id.southampton.ac.uk/equipment/E10284