→ dcterms:description → "Wafer scribing tool, Vanadium Fibre Laser (1064nm wavelength, 0.25mJ pulse energy, 25um spot size), up to 5000 mm/s scanning speed, programmable z-axis, 245 lens upgrade allowing 220mm diameter field size, vision system for lase focusiing"^^xsd:string
→ skos:notation → "E10289"^^http://id.southampton.ac.uk/ns/equipment-code-scheme
→ rdfs:comment → "Wafer scribing tool, Vanadium Fibre Laser (1064nm wavelength, 0.25mJ pulse energy, 25um spot size), up to 5000 mm/s scanning speed, programmable z-axis, 245 lens upgrade allowing 220mm diameter field size, vision system for lase focusiing"^^xsd:string
→ dc:description → "Wafer scribing tool, Vanadium Fibre Laser (1064nm wavelength, 0.25mJ pulse energy, 25um spot size), up to 5000 mm/s scanning speed, programmable z-axis, 245 lens upgrade allowing 220mm diameter field size, vision system for lase focusiing"^^xsd:string
← is
foaf:depicts of
← http://data.southampton.ac.uk/image-archive/equipment/raw/E10289-200844-P1000874.jpg,
http://data.southampton.ac.uk/image-archive/equipment/100/E10289-200844-P1000874.jpg,
http://data.southampton.ac.uk/image-archive/equipment/200/E10289-200844-P1000874.jpg,
http://data.southampton.ac.uk/image-archive/equipment/300/E10289-200844-P1000874.jpg,
http://data.southampton.ac.uk/image-archive/equipment/400/E10289-200844-P1000874.jpg,
http://data.southampton.ac.uk/image-archive/equipment/50/E10289-200844-P1000874.jpg,
https://data.southampton.ac.uk/image-archive/equipment/100/E10289-200844-P1000874.JPG,
https://data.southampton.ac.uk/image-archive/equipment/1000/E10289-200844-P1000874.JPG,
https://data.southampton.ac.uk/image-archive/equipment/1600/E10289-200844-P1000874.JPG,
https://data.southampton.ac.uk/image-archive/equipment/1920/E10289-200844-P1000874.JPG,
https://data.southampton.ac.uk/image-archive/equipment/200/E10289-200844-P1000874.JPG,
https://data.southampton.ac.uk/image-archive/equipment/220x220/E10289-200844-P1000874.JPG,
https://data.southampton.ac.uk/image-archive/equipment/240x260/E10289-200844-P1000874.JPG,
https://data.southampton.ac.uk/image-archive/equipment/300/E10289-200844-P1000874.JPG,
https://data.southampton.ac.uk/image-archive/equipment/320x198/E10289-200844-P1000874.JPG,
https://data.southampton.ac.uk/image-archive/equipment/400/E10289-200844-P1000874.JPG,
https://data.southampton.ac.uk/image-archive/equipment/480x297/E10289-200844-P1000874.JPG,
https://data.southampton.ac.uk/image-archive/equipment/50/E10289-200844-P1000874.JPG,
https://data.southampton.ac.uk/image-archive/equipment/600/E10289-200844-P1000874.JPG,
https://data.southampton.ac.uk/image-archive/equipment/800/E10289-200844-P1000874.JPG,
https://data.southampton.ac.uk/image-archive/equipment/800x600/E10289-200844-P1000874.JPG,
https://data.southampton.ac.uk/image-archive/equipment/raw/E10289-200844-P1000874.JPG
→ rdfs:label → "University of Southampton"^^xsd:string
→ rdfs:label → "School of Electronics & Computer Science"^^xsd:string
→ rdfs:label → "Physical Sciences and Engineering"^^xsd:string
→ rdfs:label → "Clean Rooms - Nanofabrication"^^xsd:string