→ dcterms:description → "Measures roughness, waviness, step height and wafer stress, 2D and 3D fully autiomated data scans, sequencing capable, up to 8" substrates, vertical features from 100A-300um with a vertical resolution down to 0.5A."
→ skos:notation → "E10291"^^http://id.southampton.ac.uk/ns/equipment-code-scheme
→ dc:description → "Measures roughness, waviness, step height and wafer stress, 2D and 3D fully autiomated data scans, sequencing capable, up to 8" substrates, vertical features from 100A-300um with a vertical resolution down to 0.5A."
→ rdfs:comment → "Measures roughness, waviness, step height and wafer stress, 2D and 3D fully autiomated data scans, sequencing capable, up to 8" substrates, vertical features from 100A-300um with a vertical resolution down to 0.5A."
← is
foaf:depicts of
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https://data.southampton.ac.uk/image-archive/equipment/600/E10291-200838-P1000843.JPG,
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https://data.southampton.ac.uk/image-archive/equipment/480x297/E10291-200838-P1000843.JPG,
https://data.southampton.ac.uk/image-archive/equipment/320x198/E10291-200838-P1000843.JPG,
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→ rdfs:label → "Physical Sciences and Engineering"
→ rdfs:label → "School of Electronics & Computer Science"
← is
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