→ dcterms:description → "Particle measurement tool, 150mm substrates, sub micron particles down to 0.2um, measurement time 30 sec on 6" wafers, particles sensitivity 0.2um diameter latex spheres, haze sensitivity 0.4ppm, spatial resolution 50um spacing minimum, measurement range 0.004um and 102um in twelve ranges and 256 gradations."^^xsd:string
→ skos:notation → "E10293"^^http://id.southampton.ac.uk/ns/equipment-code-scheme
→ rdfs:comment → "Particle measurement tool, 150mm substrates, sub micron particles down to 0.2um, measurement time 30 sec on 6" wafers, particles sensitivity 0.2um diameter latex spheres, haze sensitivity 0.4ppm, spatial resolution 50um spacing minimum, measurement range 0.004um and 102um in twelve ranges and 256 gradations."^^xsd:string
→ dc:description → "Particle measurement tool, 150mm substrates, sub micron particles down to 0.2um, measurement time 30 sec on 6" wafers, particles sensitivity 0.2um diameter latex spheres, haze sensitivity 0.4ppm, spatial resolution 50um spacing minimum, measurement range 0.004um and 102um in twelve ranges and 256 gradations."^^xsd:string
← is
foaf:depicts of
← http://data.southampton.ac.uk/image-archive/equipment/raw/E10293-200901-P1010242.jpg,
http://data.southampton.ac.uk/image-archive/equipment/100/E10293-200901-P1010242.jpg,
http://data.southampton.ac.uk/image-archive/equipment/200/E10293-200901-P1010242.jpg,
http://data.southampton.ac.uk/image-archive/equipment/300/E10293-200901-P1010242.jpg,
http://data.southampton.ac.uk/image-archive/equipment/400/E10293-200901-P1010242.jpg,
http://data.southampton.ac.uk/image-archive/equipment/50/E10293-200901-P1010242.jpg,
https://data.southampton.ac.uk/image-archive/equipment/100/E10293-200901-P1010242.JPG,
https://data.southampton.ac.uk/image-archive/equipment/1000/E10293-200901-P1010242.JPG,
https://data.southampton.ac.uk/image-archive/equipment/1600/E10293-200901-P1010242.JPG,
https://data.southampton.ac.uk/image-archive/equipment/1920/E10293-200901-P1010242.JPG,
https://data.southampton.ac.uk/image-archive/equipment/200/E10293-200901-P1010242.JPG,
https://data.southampton.ac.uk/image-archive/equipment/220x220/E10293-200901-P1010242.JPG,
https://data.southampton.ac.uk/image-archive/equipment/240x260/E10293-200901-P1010242.JPG,
https://data.southampton.ac.uk/image-archive/equipment/300/E10293-200901-P1010242.JPG,
https://data.southampton.ac.uk/image-archive/equipment/320x198/E10293-200901-P1010242.JPG,
https://data.southampton.ac.uk/image-archive/equipment/400/E10293-200901-P1010242.JPG,
https://data.southampton.ac.uk/image-archive/equipment/480x297/E10293-200901-P1010242.JPG,
https://data.southampton.ac.uk/image-archive/equipment/50/E10293-200901-P1010242.JPG,
https://data.southampton.ac.uk/image-archive/equipment/600/E10293-200901-P1010242.JPG,
https://data.southampton.ac.uk/image-archive/equipment/800/E10293-200901-P1010242.JPG,
https://data.southampton.ac.uk/image-archive/equipment/800x600/E10293-200901-P1010242.JPG,
https://data.southampton.ac.uk/image-archive/equipment/raw/E10293-200901-P1010242.JPG
→ rdfs:label → "University of Southampton"^^xsd:string
→ rdfs:label → "School of Electronics & Computer Science"^^xsd:string
→ rdfs:label → "Physical Sciences and Engineering"^^xsd:string
→ rdfs:label → "Clean Rooms - Nanofabrication"^^xsd:string