http://id.southampton.ac.uk/equipment/E10293
rdf:type oo:Equipment
rdfs:label "Measurement system"^^xsd:string
dcterms:description "Particle measurement tool, 150mm substrates, sub micron particles down to 0.2um, measurement time 30 sec on 6" wafers, particles sensitivity 0.2um diameter latex spheres, haze sensitivity 0.4ppm, spatial resolution 50um spacing minimum, measurement range 0.004um and 102um in twelve ranges and 256 gradations."^^xsd:string
skos:notation "E10293"^^http://id.southampton.ac.uk/ns/equipment-code-scheme
http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within http://id.southampton.ac.uk/building/53
rdfs:comment "Particle measurement tool, 150mm substrates, sub micron particles down to 0.2um, measurement time 30 sec on 6" wafers, particles sensitivity 0.2um diameter latex spheres, haze sensitivity 0.4ppm, spatial resolution 50um spacing minimum, measurement range 0.004um and 102um in twelve ranges and 256 gradations."^^xsd:string
foaf:depiction http://data.southampton.ac.uk/image-archive/equipment/raw/E10293-200901-P1010242.jpg
oo:contact http://id.southampton.ac.uk/equipment/E10293#secondary_contact
foaf:page http://www.southampton-nanofab.com/characterisation/
dc:description "Particle measurement tool, 150mm substrates, sub micron particles down to 0.2um, measurement time 30 sec on 6" wafers, particles sensitivity 0.2um diameter latex spheres, haze sensitivity 0.4ppm, spatial resolution 50um spacing minimum, measurement range 0.004um and 102um in twelve ranges and 256 gradations."^^xsd:string
oo:formalOrganization http://id.southampton.ac.uk/
oo:organizationPart http://id.southampton.ac.uk/org/FP, http://id.southampton.ac.uk/org/F7
oo:primaryContact http://id.southampton.ac.uk/equipment/E10293#primary_contact
oo:relatedFacility http://id.southampton.ac.uk/facility/F10014
is foaf:depicts of http://data.southampton.ac.uk/image-archive/equipment/raw/E10293-200901-P1010242.jpg, http://data.southampton.ac.uk/image-archive/equipment/100/E10293-200901-P1010242.jpg, http://data.southampton.ac.uk/image-archive/equipment/200/E10293-200901-P1010242.jpg, http://data.southampton.ac.uk/image-archive/equipment/300/E10293-200901-P1010242.jpg, http://data.southampton.ac.uk/image-archive/equipment/400/E10293-200901-P1010242.jpg, http://data.southampton.ac.uk/image-archive/equipment/50/E10293-200901-P1010242.jpg, https://data.southampton.ac.uk/image-archive/equipment/100/E10293-200901-P1010242.JPG, https://data.southampton.ac.uk/image-archive/equipment/1000/E10293-200901-P1010242.JPG, https://data.southampton.ac.uk/image-archive/equipment/1600/E10293-200901-P1010242.JPG, https://data.southampton.ac.uk/image-archive/equipment/1920/E10293-200901-P1010242.JPG, https://data.southampton.ac.uk/image-archive/equipment/200/E10293-200901-P1010242.JPG, https://data.southampton.ac.uk/image-archive/equipment/220x220/E10293-200901-P1010242.JPG, https://data.southampton.ac.uk/image-archive/equipment/240x260/E10293-200901-P1010242.JPG, https://data.southampton.ac.uk/image-archive/equipment/300/E10293-200901-P1010242.JPG, https://data.southampton.ac.uk/image-archive/equipment/320x198/E10293-200901-P1010242.JPG, https://data.southampton.ac.uk/image-archive/equipment/400/E10293-200901-P1010242.JPG, https://data.southampton.ac.uk/image-archive/equipment/480x297/E10293-200901-P1010242.JPG, https://data.southampton.ac.uk/image-archive/equipment/50/E10293-200901-P1010242.JPG, https://data.southampton.ac.uk/image-archive/equipment/600/E10293-200901-P1010242.JPG, https://data.southampton.ac.uk/image-archive/equipment/800/E10293-200901-P1010242.JPG, https://data.southampton.ac.uk/image-archive/equipment/800x600/E10293-200901-P1010242.JPG, https://data.southampton.ac.uk/image-archive/equipment/raw/E10293-200901-P1010242.JPG
 
http://id.southampton.ac.uk/building/53
rdf:type http://vocab.deri.ie/rooms#Building, http://id.southampton.ac.uk/ns/UoSBuilding
rdfs:label "New Mountbatten"^^xsd:string
is http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within of http://id.southampton.ac.uk/equipment/E10293
 
http://data.southampton.ac.uk/image-archive/equipment/raw/E10293-200901-P1010242.jpg
foaf:depicts http://id.southampton.ac.uk/equipment/E10293
is foaf:depiction of http://id.southampton.ac.uk/equipment/E10293
 
http://id.southampton.ac.uk/equipment/E10293#secondary_contact
rdf:type foaf:Person
is oo:contact of http://id.southampton.ac.uk/equipment/E10293
 
http://id.southampton.ac.uk/
rdf:type http://purl.org/vocab/aiiso/schema#Institution, http://www.w3.org/ns/org#FormalOrganization, http://www.w3.org/ns/org#Organization, foaf:Organization
rdfs:label "University of Southampton"^^xsd:string
is oo:formalOrganization of http://id.southampton.ac.uk/equipment/E10293
 
http://id.southampton.ac.uk/org/FP
rdf:type http://www.w3.org/ns/org#Organization
rdfs:label "School of Electronics & Computer Science"^^xsd:string
is oo:organizationPart of http://id.southampton.ac.uk/equipment/E10293
 
http://id.southampton.ac.uk/org/F7
rdf:type http://www.w3.org/ns/org#OrganizationalUnit, http://www.w3.org/ns/org#Organization
rdfs:label "Physical Sciences and Engineering"^^xsd:string
is oo:organizationPart of http://id.southampton.ac.uk/equipment/E10293
 
http://id.southampton.ac.uk/equipment/E10293#primary_contact
rdf:type foaf:Agent
foaf:name "LESSEY, MARK"^^xsd:string
is oo:primaryContact of http://id.southampton.ac.uk/equipment/E10293
 
http://id.southampton.ac.uk/facility/F10014
rdf:type oo:Facility
rdfs:label "Clean Rooms - Nanofabrication"^^xsd:string
is oo:relatedFacility of http://id.southampton.ac.uk/equipment/E10293
 
http://data.southampton.ac.uk/image-archive/equipment/100/E10293-200901-P1010242.jpg
foaf:depicts http://id.southampton.ac.uk/equipment/E10293
 
http://data.southampton.ac.uk/image-archive/equipment/200/E10293-200901-P1010242.jpg
foaf:depicts http://id.southampton.ac.uk/equipment/E10293
 
http://data.southampton.ac.uk/image-archive/equipment/300/E10293-200901-P1010242.jpg
foaf:depicts http://id.southampton.ac.uk/equipment/E10293
 
http://data.southampton.ac.uk/image-archive/equipment/400/E10293-200901-P1010242.jpg
foaf:depicts http://id.southampton.ac.uk/equipment/E10293
 
http://data.southampton.ac.uk/image-archive/equipment/50/E10293-200901-P1010242.jpg
foaf:depicts http://id.southampton.ac.uk/equipment/E10293
 
https://data.southampton.ac.uk/image-archive/equipment/100/E10293-200901-P1010242.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10293
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "75"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "100"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.3333333333333"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "2085"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/1000/E10293-200901-P1010242.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10293
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "750"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "1000"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.3333333333333"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "46281"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/1600/E10293-200901-P1010242.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10293
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "1200"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "1600"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.3333333333333"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "104726"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/1920/E10293-200901-P1010242.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10293
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "1440"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "1920"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.3333333333333"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "154484"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/200/E10293-200901-P1010242.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10293
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "150"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "200"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.3333333333333"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "4528"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/220x220/E10293-200901-P1010242.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10293
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "220"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "220"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "6128"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/240x260/E10293-200901-P1010242.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10293
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "260"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "240"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "0.92307692307692"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "6917"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/300/E10293-200901-P1010242.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10293
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "225"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "300"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.3333333333333"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "7995"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/320x198/E10293-200901-P1010242.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10293
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "198"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "320"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.6161616161616"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "7068"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/400/E10293-200901-P1010242.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10293
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "300"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "400"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.3333333333333"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "11874"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/480x297/E10293-200901-P1010242.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10293
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "297"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "480"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.6161616161616"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "12557"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/50/E10293-200901-P1010242.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10293
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "37"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "50"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.3513513513514"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "1224"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/600/E10293-200901-P1010242.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10293
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "450"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "600"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.3333333333333"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "21526"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/800/E10293-200901-P1010242.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10293
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "600"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "800"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.3333333333333"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "32440"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/800x600/E10293-200901-P1010242.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10293
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "600"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "800"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.3333333333333"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "32440"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/raw/E10293-200901-P1010242.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10293
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "3240"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "4320"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.3333333333333"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "5514752"^^xsd:integer
dcterms:thing http://example.org