→ rdf:type → oo:Equipment

→ rdfs:label → "Plasmalab 80 Plus / Compact Modular Plasma System"^^xsd:string

→ dcterms:description → "Parallel plate RF etcher for glass etching primarily using SF6 and CHF3. Can also be used for ashing using O2."^^xsd:string

→ skos:notation → "E10322"^^http://id.southampton.ac.uk/ns/equipment-code-scheme

→ http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within → http://id.southampton.ac.uk/building/53

→ rdfs:comment → "Parallel plate RF etcher for glass etching primarily using SF6 and CHF3. Can also be used for ashing using O2."^^xsd:string

→ foaf:depiction → http://data.southampton.ac.uk/image-archive/equipment/raw/E10322-200479-P1000628.jpg

→ oo:contact → http://id.southampton.ac.uk/equipment/E10322#secondary_contact

→ foaf:page → http://www.orc.soton.ac.uk/integratedcleanroom.html

→ dc:description → "Parallel plate RF etcher for glass etching primarily using SF6 and CHF3. Can also be used for ashing using O2."^^xsd:string

→ oo:formalOrganization → http://id.southampton.ac.uk/

→ oo:organizationPart → http://id.southampton.ac.uk/org/F7, http://id.southampton.ac.uk/org/GN

→ oo:primaryContact → http://id.southampton.ac.uk/equipment/E10322#primary_contact

→ oo:relatedFacility → http://id.southampton.ac.uk/facility/F10010

← is foaf:depicts of ← http://data.southampton.ac.uk/image-archive/equipment/raw/E10322-200479-P1000628.jpg, http://data.southampton.ac.uk/image-archive/equipment/100/E10322-200479-P1000628.jpg, http://data.southampton.ac.uk/image-archive/equipment/200/E10322-200479-P1000628.jpg, http://data.southampton.ac.uk/image-archive/equipment/300/E10322-200479-P1000628.jpg, http://data.southampton.ac.uk/image-archive/equipment/400/E10322-200479-P1000628.jpg, http://data.southampton.ac.uk/image-archive/equipment/50/E10322-200479-P1000628.jpg, https://data.southampton.ac.uk/image-archive/equipment/100/E10322-200479-P1000628.JPG, https://data.southampton.ac.uk/image-archive/equipment/1000/E10322-200479-P1000628.JPG, https://data.southampton.ac.uk/image-archive/equipment/1600/E10322-200479-P1000628.JPG, https://data.southampton.ac.uk/image-archive/equipment/1920/E10322-200479-P1000628.JPG, https://data.southampton.ac.uk/image-archive/equipment/200/E10322-200479-P1000628.JPG, https://data.southampton.ac.uk/image-archive/equipment/220x220/E10322-200479-P1000628.JPG, https://data.southampton.ac.uk/image-archive/equipment/240x260/E10322-200479-P1000628.JPG, https://data.southampton.ac.uk/image-archive/equipment/300/E10322-200479-P1000628.JPG, https://data.southampton.ac.uk/image-archive/equipment/320x198/E10322-200479-P1000628.JPG, https://data.southampton.ac.uk/image-archive/equipment/400/E10322-200479-P1000628.JPG, https://data.southampton.ac.uk/image-archive/equipment/480x297/E10322-200479-P1000628.JPG, https://data.southampton.ac.uk/image-archive/equipment/50/E10322-200479-P1000628.JPG, https://data.southampton.ac.uk/image-archive/equipment/600/E10322-200479-P1000628.JPG, https://data.southampton.ac.uk/image-archive/equipment/800/E10322-200479-P1000628.JPG, https://data.southampton.ac.uk/image-archive/equipment/800x600/E10322-200479-P1000628.JPG, https://data.southampton.ac.uk/image-archive/equipment/raw/E10322-200479-P1000628.JPG

→ rdf:type → http://vocab.deri.ie/rooms#Building, http://id.southampton.ac.uk/ns/UoSBuilding

→ rdfs:label → "New Mountbatten"^^xsd:string

← is http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within of ← http://id.southampton.ac.uk/equipment/E10322

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10322

← is foaf:depiction of ← http://id.southampton.ac.uk/equipment/E10322

→ rdf:type → foaf:Person

← is oo:contact of ← http://id.southampton.ac.uk/equipment/E10322

→ rdf:type → http://purl.org/vocab/aiiso/schema#Institution, http://www.w3.org/ns/org#FormalOrganization, http://www.w3.org/ns/org#Organization, foaf:Organization

→ rdfs:label → "University of Southampton"^^xsd:string

← is oo:formalOrganization of ← http://id.southampton.ac.uk/equipment/E10322

→ rdf:type → http://www.w3.org/ns/org#OrganizationalUnit, http://www.w3.org/ns/org#Organization

→ rdfs:label → "Physical Sciences and Engineering"^^xsd:string

← is oo:organizationPart of ← http://id.southampton.ac.uk/equipment/E10322

→ rdf:type → http://www.w3.org/ns/org#Organization

→ rdfs:label → "Faculty Central (FEPS)"^^xsd:string

← is oo:organizationPart of ← http://id.southampton.ac.uk/equipment/E10322

→ rdf:type → foaf:Agent

→ foaf:name → "LESSEY, MARK"^^xsd:string

← is oo:primaryContact of ← http://id.southampton.ac.uk/equipment/E10322

→ rdf:type → oo:Facility

→ rdfs:label → "Clean Rooms - Integrated Photonics"^^xsd:string

← is oo:relatedFacility of ← http://id.southampton.ac.uk/equipment/E10322

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10322

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10322

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10322

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10322

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10322

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10322

→ rdf:type → foaf:Image

→ dcterms:format → http://purl.org/xtypes/Format-JPEG

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height → "133"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width → "100"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio → "0.75187969924812"^^xsd:float

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize → "3608"^^xsd:integer

→ dcterms:thing → http://example.org

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10322

→ rdf:type → foaf:Image

→ dcterms:format → http://purl.org/xtypes/Format-JPEG

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height → "1333"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width → "1000"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio → "0.75018754688672"^^xsd:float

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize → "156536"^^xsd:integer

→ dcterms:thing → http://example.org

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10322

→ rdf:type → foaf:Image

→ dcterms:format → http://purl.org/xtypes/Format-JPEG

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height → "2133"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width → "1600"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio → "0.75011720581341"^^xsd:float

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize → "390518"^^xsd:integer

→ dcterms:thing → http://example.org

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10322

→ rdf:type → foaf:Image

→ dcterms:format → http://purl.org/xtypes/Format-JPEG

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height → "2560"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width → "1920"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio → "0.75"^^xsd:float

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize → "558917"^^xsd:integer

→ dcterms:thing → http://example.org

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10322

→ rdf:type → foaf:Image

→ dcterms:format → http://purl.org/xtypes/Format-JPEG

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height → "266"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width → "200"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio → "0.75187969924812"^^xsd:float

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize → "9710"^^xsd:integer

→ dcterms:thing → http://example.org

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10322

→ rdf:type → foaf:Image

→ dcterms:format → http://purl.org/xtypes/Format-JPEG

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height → "220"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width → "220"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio → "1"^^xsd:float

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize → "8856"^^xsd:integer

→ dcterms:thing → http://example.org

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10322

→ rdf:type → foaf:Image

→ dcterms:format → http://purl.org/xtypes/Format-JPEG

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height → "260"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width → "240"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio → "0.92307692307692"^^xsd:float

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize → "10760"^^xsd:integer

→ dcterms:thing → http://example.org

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10322

→ rdf:type → foaf:Image

→ dcterms:format → http://purl.org/xtypes/Format-JPEG

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height → "400"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width → "300"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio → "0.75"^^xsd:float

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize → "18700"^^xsd:integer

→ dcterms:thing → http://example.org

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10322

→ rdf:type → foaf:Image

→ dcterms:format → http://purl.org/xtypes/Format-JPEG

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height → "198"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width → "320"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio → "1.6161616161616"^^xsd:float

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize → "9999"^^xsd:integer

→ dcterms:thing → http://example.org

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10322

→ rdf:type → foaf:Image

→ dcterms:format → http://purl.org/xtypes/Format-JPEG

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height → "533"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width → "400"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio → "0.75046904315197"^^xsd:float

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize → "30580"^^xsd:integer

→ dcterms:thing → http://example.org

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10322

→ rdf:type → foaf:Image

→ dcterms:format → http://purl.org/xtypes/Format-JPEG

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height → "297"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width → "480"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio → "1.6161616161616"^^xsd:float

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize → "18898"^^xsd:integer

→ dcterms:thing → http://example.org

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10322

→ rdf:type → foaf:Image

→ dcterms:format → http://purl.org/xtypes/Format-JPEG

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height → "66"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width → "50"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio → "0.75757575757576"^^xsd:float

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize → "1677"^^xsd:integer

→ dcterms:thing → http://example.org

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10322

→ rdf:type → foaf:Image

→ dcterms:format → http://purl.org/xtypes/Format-JPEG

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height → "800"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width → "600"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio → "0.75"^^xsd:float

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize → "61295"^^xsd:integer

→ dcterms:thing → http://example.org

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10322

→ rdf:type → foaf:Image

→ dcterms:format → http://purl.org/xtypes/Format-JPEG

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height → "1066"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width → "800"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio → "0.75046904315197"^^xsd:float

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize → "102991"^^xsd:integer

→ dcterms:thing → http://example.org

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10322

→ rdf:type → foaf:Image

→ dcterms:format → http://purl.org/xtypes/Format-JPEG

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height → "600"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width → "800"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio → "1.3333333333333"^^xsd:float

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize → "52008"^^xsd:integer

→ dcterms:thing → http://example.org

→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10322

→ rdf:type → foaf:Image

→ dcterms:format → http://purl.org/xtypes/Format-JPEG

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height → "4320"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width → "3240"^^xsd:integer

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio → "0.75"^^xsd:float

→ http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize → "5067992"^^xsd:integer

→ dcterms:thing → http://example.org