http://id.southampton.ac.uk/equipment/E10322
rdf:type oo:Equipment
rdfs:label "Plasmalab 80 Plus / Compact Modular Plasma System"^^xsd:string
dcterms:description "Parallel plate RF etcher for glass etching primarily using SF6 and CHF3. Can also be used for ashing using O2."^^xsd:string
skos:notation "E10322"^^http://id.southampton.ac.uk/ns/equipment-code-scheme
http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within http://id.southampton.ac.uk/building/53
rdfs:comment "Parallel plate RF etcher for glass etching primarily using SF6 and CHF3. Can also be used for ashing using O2."^^xsd:string
oo:contact http://id.southampton.ac.uk/equipment/E10322#secondary_contact
foaf:page http://www.orc.soton.ac.uk/integratedcleanroom.html
dc:description "Parallel plate RF etcher for glass etching primarily using SF6 and CHF3. Can also be used for ashing using O2."^^xsd:string
oo:formalOrganization http://id.southampton.ac.uk/
oo:organizationPart http://id.southampton.ac.uk/org/F7, http://id.southampton.ac.uk/org/GN
oo:primaryContact http://id.southampton.ac.uk/equipment/E10322#primary_contact
oo:relatedFacility http://id.southampton.ac.uk/facility/F10010
is foaf:depicts of https://data.southampton.ac.uk/image-archive/equipment/100/E10322-200479-P1000628.JPG, https://data.southampton.ac.uk/image-archive/equipment/1000/E10322-200479-P1000628.JPG, https://data.southampton.ac.uk/image-archive/equipment/1600/E10322-200479-P1000628.JPG, https://data.southampton.ac.uk/image-archive/equipment/1920/E10322-200479-P1000628.JPG, https://data.southampton.ac.uk/image-archive/equipment/200/E10322-200479-P1000628.JPG, https://data.southampton.ac.uk/image-archive/equipment/220x220/E10322-200479-P1000628.JPG, https://data.southampton.ac.uk/image-archive/equipment/240x260/E10322-200479-P1000628.JPG, https://data.southampton.ac.uk/image-archive/equipment/300/E10322-200479-P1000628.JPG, https://data.southampton.ac.uk/image-archive/equipment/320x198/E10322-200479-P1000628.JPG, https://data.southampton.ac.uk/image-archive/equipment/400/E10322-200479-P1000628.JPG, https://data.southampton.ac.uk/image-archive/equipment/480x297/E10322-200479-P1000628.JPG, https://data.southampton.ac.uk/image-archive/equipment/50/E10322-200479-P1000628.JPG, https://data.southampton.ac.uk/image-archive/equipment/600/E10322-200479-P1000628.JPG, https://data.southampton.ac.uk/image-archive/equipment/800/E10322-200479-P1000628.JPG, https://data.southampton.ac.uk/image-archive/equipment/800x600/E10322-200479-P1000628.JPG, https://data.southampton.ac.uk/image-archive/equipment/raw/E10322-200479-P1000628.JPG
 
http://id.southampton.ac.uk/building/53
rdf:type http://vocab.deri.ie/rooms#Building, http://id.southampton.ac.uk/ns/UoSBuilding
rdfs:label "New Mountbatten"^^xsd:string
is http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within of http://id.southampton.ac.uk/equipment/E10322
 
http://id.southampton.ac.uk/equipment/E10322#secondary_contact
rdf:type foaf:Person
is oo:contact of http://id.southampton.ac.uk/equipment/E10322
 
http://id.southampton.ac.uk/
rdf:type http://purl.org/vocab/aiiso/schema#Institution, http://www.w3.org/ns/org#FormalOrganization, http://www.w3.org/ns/org#Organization, foaf:Organization
rdfs:label "University of Southampton"^^xsd:string
is oo:formalOrganization of http://id.southampton.ac.uk/equipment/E10322
 
http://id.southampton.ac.uk/org/F7
rdf:type http://www.w3.org/ns/org#OrganizationalUnit, http://www.w3.org/ns/org#Organization
rdfs:label "Physical Sciences and Engineering"^^xsd:string
is oo:organizationPart of http://id.southampton.ac.uk/equipment/E10322
 
http://id.southampton.ac.uk/org/GN
rdf:type http://www.w3.org/ns/org#Organization
rdfs:label "Faculty Central (FEPS)"^^xsd:string
is oo:organizationPart of http://id.southampton.ac.uk/equipment/E10322
 
http://id.southampton.ac.uk/equipment/E10322#primary_contact
rdf:type foaf:Agent
foaf:name "LESSEY, MARK"^^xsd:string
is oo:primaryContact of http://id.southampton.ac.uk/equipment/E10322
 
http://id.southampton.ac.uk/facility/F10010
rdf:type oo:Facility
rdfs:label "Clean Rooms - Integrated Photonics"^^xsd:string
is oo:relatedFacility of http://id.southampton.ac.uk/equipment/E10322
 
https://data.southampton.ac.uk/image-archive/equipment/100/E10322-200479-P1000628.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10322
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "133"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "100"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "0.75187969924812"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "3608"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/1000/E10322-200479-P1000628.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10322
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "1333"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "1000"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "0.75018754688672"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "156536"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/1600/E10322-200479-P1000628.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10322
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "2133"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "1600"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "0.75011720581341"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "390518"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/1920/E10322-200479-P1000628.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10322
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "2560"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "1920"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "0.75"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "558917"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/200/E10322-200479-P1000628.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10322
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "266"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "200"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "0.75187969924812"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "9710"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/220x220/E10322-200479-P1000628.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10322
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "220"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "220"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "8856"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/240x260/E10322-200479-P1000628.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10322
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "260"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "240"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "0.92307692307692"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "10760"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/300/E10322-200479-P1000628.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10322
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "400"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "300"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "0.75"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "18700"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/320x198/E10322-200479-P1000628.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10322
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "198"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "320"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.6161616161616"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "9999"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/400/E10322-200479-P1000628.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10322
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "533"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "400"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "0.75046904315197"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "30580"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/480x297/E10322-200479-P1000628.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10322
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "297"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "480"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.6161616161616"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "18898"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/50/E10322-200479-P1000628.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10322
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "66"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "50"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "0.75757575757576"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "1677"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/600/E10322-200479-P1000628.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10322
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "800"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "600"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "0.75"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "61295"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/800/E10322-200479-P1000628.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10322
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "1066"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "800"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "0.75046904315197"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "102991"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/800x600/E10322-200479-P1000628.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10322
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "600"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "800"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "1.3333333333333"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "52008"^^xsd:integer
dcterms:thing http://example.org
 
https://data.southampton.ac.uk/image-archive/equipment/raw/E10322-200479-P1000628.JPG
foaf:depicts http://id.southampton.ac.uk/equipment/E10322
rdf:type foaf:Image
dcterms:format http://purl.org/xtypes/Format-JPEG
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#height "4320"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#width "3240"^^xsd:integer
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#aspectRatio "0.75"^^xsd:float
http://www.semanticdesktop.org/ontologies/2007/03/22/nfo#fileSize "5067992"^^xsd:integer
dcterms:thing http://example.org