→ dcterms:description → "Allows printing of structures on flat substrates by replication of a mask using photoresist exposure and development followed by etching, for example. Feature sizes below 1 micron may be replicated over wafers up to 100mm diameter. Double-sided aligning allows alignment of features on both sides of a silicon wafer"^^xsd:string
→ skos:notation → "E10329"^^http://id.southampton.ac.uk/ns/equipment-code-scheme
→ rdfs:comment → "Allows printing of structures on flat substrates by replication of a mask using photoresist exposure and development followed by etching, for example. Feature sizes below 1 micron may be replicated over wafers up to 100mm diameter. Double-sided aligning allows alignment of features on both sides of a silicon wafer"^^xsd:string
→ dc:description → "Allows printing of structures on flat substrates by replication of a mask using photoresist exposure and development followed by etching, for example. Feature sizes below 1 micron may be replicated over wafers up to 100mm diameter. Double-sided aligning allows alignment of features on both sides of a silicon wafer"^^xsd:string
← is
foaf:depicts of
← http://data.southampton.ac.uk/image-archive/equipment/raw/E10329-200488-P1000637.jpg,
http://data.southampton.ac.uk/image-archive/equipment/raw/E10329-200488-P1000639.jpg,
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https://data.southampton.ac.uk/image-archive/equipment/320x198/E10329-200488-P1000637.JPG,
https://data.southampton.ac.uk/image-archive/equipment/400/E10329-200488-P1000637.JPG,
https://data.southampton.ac.uk/image-archive/equipment/480x297/E10329-200488-P1000637.JPG,
https://data.southampton.ac.uk/image-archive/equipment/50/E10329-200488-P1000637.JPG,
https://data.southampton.ac.uk/image-archive/equipment/600/E10329-200488-P1000637.JPG,
https://data.southampton.ac.uk/image-archive/equipment/800/E10329-200488-P1000637.JPG,
https://data.southampton.ac.uk/image-archive/equipment/800x600/E10329-200488-P1000637.JPG,
https://data.southampton.ac.uk/image-archive/equipment/raw/E10329-200488-P1000637.JPG
→ rdfs:label → "University of Southampton"^^xsd:string
→ rdfs:label → "Physical Sciences and Engineering"^^xsd:string
→ rdfs:label → "Optoelectronics Research Centre"^^xsd:string
→ rdfs:label → "Clean Rooms - Integrated Photonics"^^xsd:string