→ dcterms:description → "Allows printing of structures on flat substrates by replication of a mask using photoresist exposure and development followed by etching, for example. Feature sizes below 1 micron may be replicated over wafers up to 100mm diameter. Double-sided aligning allows alignment of features on both sides of a silicon wafer"^^xsd:string 
  → skos:notation → "E10329"^^http://id.southampton.ac.uk/ns/equipment-code-scheme 
  
  → rdfs:comment → "Allows printing of structures on flat substrates by replication of a mask using photoresist exposure and development followed by etching, for example. Feature sizes below 1 micron may be replicated over wafers up to 100mm diameter. Double-sided aligning allows alignment of features on both sides of a silicon wafer"^^xsd:string 
  
  
  
  → dc:description → "Allows printing of structures on flat substrates by replication of a mask using photoresist exposure and development followed by etching, for example. Feature sizes below 1 micron may be replicated over wafers up to 100mm diameter. Double-sided aligning allows alignment of features on both sides of a silicon wafer"^^xsd:string 
  
  
  
  
  ← is 
foaf:depicts of 
← http://data.southampton.ac.uk/image-archive/equipment/raw/E10329-200488-P1000637.jpg, 
http://data.southampton.ac.uk/image-archive/equipment/raw/E10329-200488-P1000639.jpg, 
http://data.southampton.ac.uk/image-archive/equipment/100/E10329-200488-P1000637.jpg, 
http://data.southampton.ac.uk/image-archive/equipment/100/E10329-200488-P1000639.jpg, 
http://data.southampton.ac.uk/image-archive/equipment/200/E10329-200488-P1000637.jpg, 
http://data.southampton.ac.uk/image-archive/equipment/200/E10329-200488-P1000639.jpg, 
http://data.southampton.ac.uk/image-archive/equipment/300/E10329-200488-P1000637.jpg, 
http://data.southampton.ac.uk/image-archive/equipment/300/E10329-200488-P1000639.jpg, 
http://data.southampton.ac.uk/image-archive/equipment/400/E10329-200488-P1000637.jpg, 
http://data.southampton.ac.uk/image-archive/equipment/400/E10329-200488-P1000639.jpg, 
http://data.southampton.ac.uk/image-archive/equipment/50/E10329-200488-P1000637.jpg, 
http://data.southampton.ac.uk/image-archive/equipment/50/E10329-200488-P1000639.jpg, 
https://data.southampton.ac.uk/image-archive/equipment/100/E10329-200488-P1000639.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/1000/E10329-200488-P1000639.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/1600/E10329-200488-P1000639.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/1920/E10329-200488-P1000639.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/200/E10329-200488-P1000639.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/220x220/E10329-200488-P1000639.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/240x260/E10329-200488-P1000639.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/300/E10329-200488-P1000639.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/320x198/E10329-200488-P1000639.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/400/E10329-200488-P1000639.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/480x297/E10329-200488-P1000639.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/50/E10329-200488-P1000639.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/600/E10329-200488-P1000639.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/800/E10329-200488-P1000639.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/800x600/E10329-200488-P1000639.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/raw/E10329-200488-P1000639.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/100/E10329-200488-P1000637.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/1000/E10329-200488-P1000637.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/1600/E10329-200488-P1000637.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/1920/E10329-200488-P1000637.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/200/E10329-200488-P1000637.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/220x220/E10329-200488-P1000637.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/240x260/E10329-200488-P1000637.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/300/E10329-200488-P1000637.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/320x198/E10329-200488-P1000637.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/400/E10329-200488-P1000637.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/480x297/E10329-200488-P1000637.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/50/E10329-200488-P1000637.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/600/E10329-200488-P1000637.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/800/E10329-200488-P1000637.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/800x600/E10329-200488-P1000637.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/raw/E10329-200488-P1000637.JPG   
 
  
  
  → rdfs:label → "University of Southampton"^^xsd:string 
    
 
  
  
  → rdfs:label → "Physical Sciences and Engineering"^^xsd:string 
    
 
  
  
  → rdfs:label → "Optoelectronics Research Centre"^^xsd:string 
    
 
  
  
  → rdfs:label → "Clean Rooms - Integrated Photonics"^^xsd:string 
    
 
  
  
  
  
  
  
  
  
  ← is 
dcterms:isVersionOf of 
← https://data.southampton.ac.uk/image-archive/equipment/100/E10329-200488-P1000639.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/1000/E10329-200488-P1000639.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/1600/E10329-200488-P1000639.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/1920/E10329-200488-P1000639.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/200/E10329-200488-P1000639.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/220x220/E10329-200488-P1000639.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/240x260/E10329-200488-P1000639.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/300/E10329-200488-P1000639.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/320x198/E10329-200488-P1000639.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/400/E10329-200488-P1000639.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/480x297/E10329-200488-P1000639.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/50/E10329-200488-P1000639.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/600/E10329-200488-P1000639.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/800/E10329-200488-P1000639.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/800x600/E10329-200488-P1000639.JPG   
 
  
  
  
  
  
  
  
  
  ← is 
dcterms:isVersionOf of 
← https://data.southampton.ac.uk/image-archive/equipment/100/E10329-200488-P1000637.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/1000/E10329-200488-P1000637.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/1600/E10329-200488-P1000637.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/1920/E10329-200488-P1000637.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/200/E10329-200488-P1000637.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/220x220/E10329-200488-P1000637.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/240x260/E10329-200488-P1000637.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/300/E10329-200488-P1000637.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/320x198/E10329-200488-P1000637.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/400/E10329-200488-P1000637.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/480x297/E10329-200488-P1000637.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/50/E10329-200488-P1000637.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/600/E10329-200488-P1000637.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/800/E10329-200488-P1000637.JPG, 
https://data.southampton.ac.uk/image-archive/equipment/800x600/E10329-200488-P1000637.JPG