→ rdfs:label → "Ionfab 300 Plus / Load Locked Ion Beam Etch System"^^xsd:string
→ dcterms:description → "Allows ion-beam milling of materials to produce etched structures following photolithography, for example. May also be used for reactive or chemically-assisted ion-beam etching, and for ion-beam deposition of materials from a target"^^xsd:string
→ skos:notation → "E10332"^^http://id.southampton.ac.uk/ns/equipment-code-scheme
→ rdfs:comment → "Allows ion-beam milling of materials to produce etched structures following photolithography, for example. May also be used for reactive or chemically-assisted ion-beam etching, and for ion-beam deposition of materials from a target"^^xsd:string
→ dc:description → "Allows ion-beam milling of materials to produce etched structures following photolithography, for example. May also be used for reactive or chemically-assisted ion-beam etching, and for ion-beam deposition of materials from a target"^^xsd:string
← is
foaf:depicts of
← http://data.southampton.ac.uk/image-archive/equipment/raw/E10332-200545-P1000626.jpg,
http://data.southampton.ac.uk/image-archive/equipment/100/E10332-200545-P1000626.jpg,
http://data.southampton.ac.uk/image-archive/equipment/200/E10332-200545-P1000626.jpg,
http://data.southampton.ac.uk/image-archive/equipment/300/E10332-200545-P1000626.jpg,
http://data.southampton.ac.uk/image-archive/equipment/400/E10332-200545-P1000626.jpg,
http://data.southampton.ac.uk/image-archive/equipment/50/E10332-200545-P1000626.jpg,
https://data.southampton.ac.uk/image-archive/equipment/100/E10332-200545-P1000626.JPG,
https://data.southampton.ac.uk/image-archive/equipment/1000/E10332-200545-P1000626.JPG,
https://data.southampton.ac.uk/image-archive/equipment/1600/E10332-200545-P1000626.JPG,
https://data.southampton.ac.uk/image-archive/equipment/1920/E10332-200545-P1000626.JPG,
https://data.southampton.ac.uk/image-archive/equipment/200/E10332-200545-P1000626.JPG,
https://data.southampton.ac.uk/image-archive/equipment/220x220/E10332-200545-P1000626.JPG,
https://data.southampton.ac.uk/image-archive/equipment/240x260/E10332-200545-P1000626.JPG,
https://data.southampton.ac.uk/image-archive/equipment/300/E10332-200545-P1000626.JPG,
https://data.southampton.ac.uk/image-archive/equipment/320x198/E10332-200545-P1000626.JPG,
https://data.southampton.ac.uk/image-archive/equipment/400/E10332-200545-P1000626.JPG,
https://data.southampton.ac.uk/image-archive/equipment/480x297/E10332-200545-P1000626.JPG,
https://data.southampton.ac.uk/image-archive/equipment/50/E10332-200545-P1000626.JPG,
https://data.southampton.ac.uk/image-archive/equipment/600/E10332-200545-P1000626.JPG,
https://data.southampton.ac.uk/image-archive/equipment/800/E10332-200545-P1000626.JPG,
https://data.southampton.ac.uk/image-archive/equipment/800x600/E10332-200545-P1000626.JPG,
https://data.southampton.ac.uk/image-archive/equipment/raw/E10332-200545-P1000626.JPG
→ rdfs:label → "University of Southampton"^^xsd:string
→ rdfs:label → "Physical Sciences and Engineering"^^xsd:string
→ rdfs:label → "Optoelectronics Research Centre"^^xsd:string
→ rdfs:label → "Clean Rooms - Integrated Photonics"^^xsd:string