→ rdfs:label → "Planar Air Bearing System"^^xsd:string
→ dcterms:description → "Designed to meet the exacting requirements of wafer, flat panel display and optical inspection and fabrication. The ABL/ABLH9000 incorporates an active preload on both vertical and horizontal surfaces. The opposing thin-film pressure maintains the bearing nominal gap tolerance. This design, in addition to the large air-bearing surface that distributes the load over a large surface area, results in a stage with outstanding stiffness that is ideal for heavy or offset loading."^^xsd:string
→ skos:notation → "E10348"^^http://id.southampton.ac.uk/ns/equipment-code-scheme
→ rdfs:comment → "Designed to meet the exacting requirements of wafer, flat panel display and optical inspection and fabrication. The ABL/ABLH9000 incorporates an active preload on both vertical and horizontal surfaces. The opposing thin-film pressure maintains the bearing nominal gap tolerance. This design, in addition to the large air-bearing surface that distributes the load over a large surface area, results in a stage with outstanding stiffness that is ideal for heavy or offset loading."^^xsd:string
→ dc:description → "Designed to meet the exacting requirements of wafer, flat panel display and optical inspection and fabrication. The ABL/ABLH9000 incorporates an active preload on both vertical and horizontal surfaces. The opposing thin-film pressure maintains the bearing nominal gap tolerance. This design, in addition to the large air-bearing surface that distributes the load over a large surface area, results in a stage with outstanding stiffness that is ideal for heavy or offset loading."^^xsd:string
← is
foaf:depicts of
← http://data.southampton.ac.uk/image-archive/equipment/raw/E10348-200678-DSC_0104.jpg,
http://data.southampton.ac.uk/image-archive/equipment/100/E10348-200678-DSC_0104.jpg,
http://data.southampton.ac.uk/image-archive/equipment/200/E10348-200678-DSC_0104.jpg,
http://data.southampton.ac.uk/image-archive/equipment/300/E10348-200678-DSC_0104.jpg,
http://data.southampton.ac.uk/image-archive/equipment/400/E10348-200678-DSC_0104.jpg,
http://data.southampton.ac.uk/image-archive/equipment/50/E10348-200678-DSC_0104.jpg,
https://data.southampton.ac.uk/image-archive/equipment/100/E10348-200678-DSC_0104.JPG,
https://data.southampton.ac.uk/image-archive/equipment/1000/E10348-200678-DSC_0104.JPG,
https://data.southampton.ac.uk/image-archive/equipment/1600/E10348-200678-DSC_0104.JPG,
https://data.southampton.ac.uk/image-archive/equipment/1920/E10348-200678-DSC_0104.JPG,
https://data.southampton.ac.uk/image-archive/equipment/200/E10348-200678-DSC_0104.JPG,
https://data.southampton.ac.uk/image-archive/equipment/220x220/E10348-200678-DSC_0104.JPG,
https://data.southampton.ac.uk/image-archive/equipment/240x260/E10348-200678-DSC_0104.JPG,
https://data.southampton.ac.uk/image-archive/equipment/300/E10348-200678-DSC_0104.JPG,
https://data.southampton.ac.uk/image-archive/equipment/320x198/E10348-200678-DSC_0104.JPG,
https://data.southampton.ac.uk/image-archive/equipment/400/E10348-200678-DSC_0104.JPG,
https://data.southampton.ac.uk/image-archive/equipment/480x297/E10348-200678-DSC_0104.JPG,
https://data.southampton.ac.uk/image-archive/equipment/50/E10348-200678-DSC_0104.JPG,
https://data.southampton.ac.uk/image-archive/equipment/600/E10348-200678-DSC_0104.JPG,
https://data.southampton.ac.uk/image-archive/equipment/800/E10348-200678-DSC_0104.JPG,
https://data.southampton.ac.uk/image-archive/equipment/800x600/E10348-200678-DSC_0104.JPG,
https://data.southampton.ac.uk/image-archive/equipment/raw/E10348-200678-DSC_0104.JPG
→ rdfs:label → "University of Southampton"^^xsd:string
→ rdfs:label → "Physical Sciences and Engineering"^^xsd:string
→ rdfs:label → "Optoelectronics Research Centre"^^xsd:string
→ rdfs:label → "Clean Rooms - Integrated Photonics"^^xsd:string