http://id.southampton.ac.uk/equipment/E10492
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rdfs:label "Coherent Enterprise II 653 Ar Ion Laser"
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dcterms:description "Ar Ion laser (352nm and 364nm). 80mW laser power class 3B. Mounted to direct write lithography system. Local ID: PH/1895"
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dc:description "Ar Ion laser (352nm and 364nm). 80mW laser power class 3B. Mounted to direct write lithography system. Local ID: PH/1895"
rdfs:comment "Ar Ion laser (352nm and 364nm). 80mW laser power class 3B. Mounted to direct write lithography system. Local ID: PH/1895"
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rdfs:label "Physical Sciences and Engineering"
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rdfs:label "School of Physics & Astronomy"
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foaf:name "LEBLANC, KATHLEEN"
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rdfs:label "Clean Rooms - Nanofabrication"
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