http://id.southampton.ac.uk/equipment/E10532
→ rdf:type → oo:Equipment
→ rdfs:label → "Dual Axis Air Bearing Sytem"^^xsd:string
→ dcterms:description → "¿High precision single plane X-Y positioning with optional airbearing [nl]
 ¿Silicon Carbide (SiC) stages freely slide on a granite reference plate using proprietary air bearing technology[nl]
 ¿Extremely rigid structure for rapid, sub-micron motion with quick settling time[nl]
 ¿Resolution up to 0.3 nm, 20 nm X-Y repeatability over full wafer[nl]
 ¿Velocity up to 400 mm/sec, acceleration up to 1.5 G[nl]
 ¿30,000 hr MTBF"^^xsd:string
→ skos:notation → "E10532"^^http://id.southampton.ac.uk/ns/equipment-code-scheme
→ http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within → http://id.southampton.ac.uk/building/7
→ rdfs:comment → "¿High precision single plane X-Y positioning with optional airbearing [nl]
 ¿Silicon Carbide (SiC) stages freely slide on a granite reference plate using proprietary air bearing technology[nl]
 ¿Extremely rigid structure for rapid, sub-micron motion with quick settling time[nl]
 ¿Resolution up to 0.3 nm, 20 nm X-Y repeatability over full wafer[nl]
 ¿Velocity up to 400 mm/sec, acceleration up to 1.5 G[nl]
 ¿30,000 hr MTBF"^^xsd:string
→ foaf:depiction → http://data.southampton.ac.uk/image-archive/equipment/raw/E10532-200592-P1000964.jpg
→ oo:contact → http://id.southampton.ac.uk/equipment/E10532#secondary_contact
→ dc:description → "¿High precision single plane X-Y positioning with optional airbearing [nl]
 ¿Silicon Carbide (SiC) stages freely slide on a granite reference plate using proprietary air bearing technology[nl]
 ¿Extremely rigid structure for rapid, sub-micron motion with quick settling time[nl]
 ¿Resolution up to 0.3 nm, 20 nm X-Y repeatability over full wafer[nl]
 ¿Velocity up to 400 mm/sec, acceleration up to 1.5 G[nl]
 ¿30,000 hr MTBF"^^xsd:string
→ oo:formalOrganization → http://id.southampton.ac.uk/
→ oo:organizationPart → http://id.southampton.ac.uk/org/BX, http://id.southampton.ac.uk/org/F2
→ oo:primaryContact → http://id.southampton.ac.uk/equipment/E10532#primary_contact
→ oo:relatedFacility → http://id.southampton.ac.uk/facility/F10000
← is foaf:depicts of ← http://data.southampton.ac.uk/image-archive/equipment/raw/E10532-200592-P1000964.jpg, http://data.southampton.ac.uk/image-archive/equipment/100/E10532-200592-P1000964.jpg, http://data.southampton.ac.uk/image-archive/equipment/200/E10532-200592-P1000964.jpg, http://data.southampton.ac.uk/image-archive/equipment/300/E10532-200592-P1000964.jpg, http://data.southampton.ac.uk/image-archive/equipment/400/E10532-200592-P1000964.jpg, http://data.southampton.ac.uk/image-archive/equipment/50/E10532-200592-P1000964.jpg
 
http://id.southampton.ac.uk/building/7
→ rdf:type → http://vocab.deri.ie/rooms#Building, http://id.southampton.ac.uk/ns/UoSBuilding
→ rdfs:label → "Lanchester"^^xsd:string
← is http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within of ← http://id.southampton.ac.uk/equipment/E10532
 
http://data.southampton.ac.uk/image-archive/equipment/raw/E10532-200592-P1000964.jpg
→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10532
← is foaf:depiction of ← http://id.southampton.ac.uk/equipment/E10532
 
http://id.southampton.ac.uk/equipment/E10532#secondary_contact
→ rdf:type → foaf:Person
← is oo:contact of ← http://id.southampton.ac.uk/equipment/E10532
 
http://id.southampton.ac.uk/
→ rdf:type → http://purl.org/vocab/aiiso/schema#Institution, http://www.w3.org/ns/org#FormalOrganization, http://www.w3.org/ns/org#Organization, foaf:Organization
→ rdfs:label → "University of Southampton"^^xsd:string
← is oo:formalOrganization of ← http://id.southampton.ac.uk/equipment/E10532
 
http://id.southampton.ac.uk/org/BX
→ rdf:type → http://www.w3.org/ns/org#Organization
→ rdfs:label → "Mechanical Engineering"^^xsd:string
← is oo:organizationPart of ← http://id.southampton.ac.uk/equipment/E10532
 
http://id.southampton.ac.uk/org/F2
→ rdf:type → http://www.w3.org/ns/org#OrganizationalUnit, http://www.w3.org/ns/org#Organization
→ rdfs:label → "Faculty of Engineering and the Environment"^^xsd:string
← is oo:organizationPart of ← http://id.southampton.ac.uk/equipment/E10532
 
http://id.southampton.ac.uk/equipment/E10532#primary_contact
→ rdf:type → foaf:Agent
→ foaf:name → "GILES, ANDREW"^^xsd:string
← is oo:primaryContact of ← http://id.southampton.ac.uk/equipment/E10532
 
http://data.southampton.ac.uk/image-archive/equipment/100/E10532-200592-P1000964.jpg
→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10532
 
http://data.southampton.ac.uk/image-archive/equipment/200/E10532-200592-P1000964.jpg
→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10532
 
http://data.southampton.ac.uk/image-archive/equipment/300/E10532-200592-P1000964.jpg
→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10532
 
http://data.southampton.ac.uk/image-archive/equipment/400/E10532-200592-P1000964.jpg
→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10532
 
http://data.southampton.ac.uk/image-archive/equipment/50/E10532-200592-P1000964.jpg
→ foaf:depicts → http://id.southampton.ac.uk/equipment/E10532