http://id.southampton.ac.uk/equipment/E10615
→ rdf:type → oo:Equipment
→ rdfs:label → "EVG150 Automated Resist Processing System"^^xsd:string
→ dcterms:description → "Designed to provide the widest range of process variations, the EVG100 series` modularity accepts spin and spray coating, developing, bake and chill modules to suit your individual production requirements. These systems accommodate the processing of an extensive range of materials such as positive and negative resists, polyimides, double-sided coating of thin resist layers, high viscosity resists, and edge protection coatings."^^xsd:string
→ skos:notation → "E10615"^^http://id.southampton.ac.uk/ns/equipment-code-scheme
→ http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within → http://id.southampton.ac.uk/building/53
→ rdfs:comment → "Designed to provide the widest range of process variations, the EVG100 series` modularity accepts spin and spray coating, developing, bake and chill modules to suit your individual production requirements. These systems accommodate the processing of an extensive range of materials such as positive and negative resists, polyimides, double-sided coating of thin resist layers, high viscosity resists, and edge protection coatings."^^xsd:string
→ oo:contact → http://id.southampton.ac.uk/equipment/E10615#secondary_contact
→ foaf:page → http://www.southampton-nanofab.com/fabrication/lithography.php
→ dc:description → "Designed to provide the widest range of process variations, the EVG100 series` modularity accepts spin and spray coating, developing, bake and chill modules to suit your individual production requirements. These systems accommodate the processing of an extensive range of materials such as positive and negative resists, polyimides, double-sided coating of thin resist layers, high viscosity resists, and edge protection coatings."^^xsd:string
→ oo:formalOrganization → http://id.southampton.ac.uk/
→ oo:organizationPart → http://id.southampton.ac.uk/org/FP, http://id.southampton.ac.uk/org/F7
→ oo:primaryContact → http://id.southampton.ac.uk/equipment/E10615#primary_contact
→ oo:relatedFacility → http://id.southampton.ac.uk/facility/F10014
 
http://id.southampton.ac.uk/building/53
→ rdf:type → http://vocab.deri.ie/rooms#Building, http://id.southampton.ac.uk/ns/UoSBuilding
→ rdfs:label → "New Mountbatten"^^xsd:string
← is http://data.ordnancesurvey.co.uk/ontology/spatialrelations/within of ← http://id.southampton.ac.uk/equipment/E10615
 
http://id.southampton.ac.uk/equipment/E10615#secondary_contact
→ rdf:type → foaf:Person
← is oo:contact of ← http://id.southampton.ac.uk/equipment/E10615
 
http://id.southampton.ac.uk/
→ rdf:type → http://purl.org/vocab/aiiso/schema#Institution, http://www.w3.org/ns/org#FormalOrganization, http://www.w3.org/ns/org#Organization, foaf:Organization
→ rdfs:label → "University of Southampton"^^xsd:string
← is oo:formalOrganization of ← http://id.southampton.ac.uk/equipment/E10615
 
http://id.southampton.ac.uk/org/FP
→ rdf:type → http://www.w3.org/ns/org#Organization
→ rdfs:label → "School of Electronics & Computer Science"^^xsd:string
← is oo:organizationPart of ← http://id.southampton.ac.uk/equipment/E10615
 
http://id.southampton.ac.uk/org/F7
→ rdf:type → http://www.w3.org/ns/org#OrganizationalUnit, http://www.w3.org/ns/org#Organization
→ rdfs:label → "Physical Sciences and Engineering"^^xsd:string
← is oo:organizationPart of ← http://id.southampton.ac.uk/equipment/E10615
 
http://id.southampton.ac.uk/equipment/E10615#primary_contact
→ rdf:type → foaf:Agent
→ foaf:name → "ANTENEY, IAIN"^^xsd:string
← is oo:primaryContact of ← http://id.southampton.ac.uk/equipment/E10615
 
http://id.southampton.ac.uk/facility/F10014
→ rdf:type → oo:Facility
→ rdfs:label → "Clean Rooms - Nanofabrication"^^xsd:string
← is oo:relatedFacility of ← http://id.southampton.ac.uk/equipment/E10615