→ rdfs:label → "XF2 Insulator Enhanced Etch Gas Injector"
→ dcterms:description → "Gas injection system for chemically-assisted focused ion beam milling of insulating materials"
→ skos:notation → "E10741"^^http://id.southampton.ac.uk/ns/equipment-code-scheme
→ dc:description → "Gas injection system for chemically-assisted focused ion beam milling of insulating materials"
→ rdfs:comment → "Gas injection system for chemically-assisted focused ion beam milling of insulating materials"
→ rdfs:label → "Physical Sciences and Engineering"
→ rdfs:label → "Clean Rooms - Focused ion beam (FIB)"