Open Data Service, University of Southampton

Open Data Service

E-Beam Lithography Conversion Kit

E-Beam Lithography Conversion Kit. Raith nanolithography system capable of writing sub 100nm dimensions with up to 16bit resolution. Local ID: PH/02287

Facility: Nanomaterials Rapid Prototyping Facility
Part of: School of Physics & Astronomy
Physical Sciences and Engineering
Location: Physics



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