Open Data Service, University of Southampton

Open Data Service

Dual Axis Air Bearing Sytem

¿High precision single plane X-Y positioning with optional airbearing  ¿Silicon Carbide (SiC) stages freely slide on a granite reference plate using proprietary air bearing technology  ¿Extremely rigid structure for rapid, sub-micron motion with quick settling time  ¿Resolution up to 0.3 nm, 20 nm X-Y repeatability over full wafer  ¿Velocity up to 400 mm/sec, acceleration up to 1.5 G  ¿30,000 hr MTBF

Part of: Mechanical Engineering
Faculty of Engineering and the Environment
Location: Lanchester



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