Dual Axis Air Bearing Sytem
¿High precision single plane X-Y positioning with optional airbearing ¿Silicon Carbide (SiC) stages freely slide on a granite reference plate using proprietary air bearing technology ¿Extremely rigid structure for rapid, sub-micron motion with quick settling time ¿Resolution up to 0.3 nm, 20 nm X-Y repeatability over full wafer ¿Velocity up to 400 mm/sec, acceleration up to 1.5 G ¿30,000 hr MTBF
| Facility: | http://id.southampton.ac.uk/facility/F10000 |
| Part of: | Mechanical Engineering Faculty of Engineering and the Environment |
| Location: | Lanchester |
Contact
GILES, ANDREW
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