Open Data Service, University of Southampton

Open Data Service

ECS - Characterisation (Measurement)

The clean room provides a range of characterisation equipment for device and material characterisation. Plan view imaging of a sample surface can be performed using field emission scanning electron microscopy (FESEM), helium ion microscopy and scanning probe microscopy. Cross-section imaging can be achieved by first making a cross-sectional cut using the focussed ion beam (FIB) system and then imaging in-situ using field emission scanning electron microscopy.




RCUK Costed:Yes
School/Dept:School of Electronics & Computer Science
Building:New Mountbatten
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Facilities and Equipment