Coolpower 4.2Gm Two Stge Systems (Obsolete/Decommissioned YE 15/16 - per YY 04/08/2016)
BAK600 e-gun/thermal evaporator is configured for non-reactive deposition of metal contact stacks , metal masking layers, some dielectrics, ITO.
| Facility: | Clean Rooms - Nanofabrication |
| Part of: | Mechanical Engineering Faculty of Engineering and the Environment |
| Location: | R J Mitchell Wind Tunnel |
Contact
YANG, YIFENG
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