Open Data Service

Optiwet St30

Photograph of Optiwet St30 at the University of Southampton (thumbnail).

Cleaner/lift-off/stripper module/developer module. 4,6,8 inch wafers, 5.6.7 inch plates.

Facility:: Clean Rooms - Nanofabrication
Part of:: School of Electronics & Computer Science
Physical Sciences and Engineering
Location:: New Mountbatten

Contact

LESSEY, MARK

If you have additions or corrections to a facility or equipment entry please contact your Faculty Finance Team.

Get the Data

You can download the raw data used to create this page:

TTL - RDF/Turtle file
RDF - RDF/XML file
RDF.HTML - HTML visualisation of raw data

Uniform Resource Identifier (URI)

The following open datasets were used to build this page:

© 2025 University of Southampton