Open Data Service
Tempress Clean Furnace Stack
150mm wafers, automated loading, dru oxidation 600-1150C, wet oxidation 600-1150C, anneal 600-1150C, temperature accuracy +/- 1C, 25 wafer boats.
- Facility:
- Clean Rooms - Nanofabrication
- Part of:
- School of Electronics & Computer Science
Physical Sciences and Engineering - Location:
- New Mountbatten
Contact
ANTENEY, IAIN
If you have additions or corrections to a facility or equipment entry please contact your Faculty Finance Team.
Get the Data
You can download the raw data used to create this page:
The following open datasets were used to build this page:
© 2025 University of Southampton