3 Stacis "Quiet Island" Support Systems
These systems are actively-damped tables onto which senstive pieces of equipment can be mounted to isolate them from vibrational interference. These are current employed underneath the Zeiss Orion Helium Ion Microscope, the Zeiss Nvision40 Focused Ion Beam and the Zeiss EVO Scanning Electron Microscope.
| Facility: | Clean Rooms - Nanofabrication |
| Part of: | School of Electronics & Computer Science Physical Sciences and Engineering |
| Location: | New Mountbatten |
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BODEN, STUART
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