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Clean Rooms - FHD

Photograph of New Mountbatten at the University of Southampton (thumbnail). — © 2010 François-Xavier Beckers. Photograph made available under a http://creativecommons.org/licenses/by/3.0/ license.

The ORC at Southampton has a state-of-the-art Flame Hydrolysis Deposition tool for growth of silica-on-silicon waveguide structures. The system allows the incorporation of germanium, phosphorous and boron doping within the silica, and is particularly optimised for high photosensitivity layer growth. The tool can grow films ranging from 2 microns to 20 microns in thickness.

Contact

SMITH, PETER - +442380592809

Information

RCUK Costed:: Yes
School/Dept:: Physical Sciences and Engineering
Building:: New Mountbatten

Equipment

Nanofab 1000 Agile

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