Open Data Service, University of Southampton

Open Data Service

ECS - Characterisation (Measurement)

The clean room provides a range of characterisation equipment for device and material characterisation. Plan view imaging of a sample surface can be performed using field emission scanning electron microscopy (FESEM), helium ion microscopy and scanning probe microscopy. Cross-section imaging can be achieved by first making a cross-sectional cut using the focussed ion beam (FIB) system and then imaging in-situ using field emission scanning electron microscopy.

Contact

DE GROOT, CORNELIS
+442380592732
C.H.de-Groot@soton.ac.uk

Information

RCUK Costed:Yes
School/Dept:Electronics & Computer Science
Building:New Mountbatten
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Get the Data

If you're that way inclined, you can get the raw data used to create this page in various formats, as listed below.

TTLRDF/Turtle file
RDFRDF/XML file
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The following open datasets were used to build this page:

Facilities and Equipment