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Coolpower 4.2Gm Two Stge Systems (Obsolete/Decommissioned YE 15/16 - per YY 04/08/2016)
BAK600 e-gun/thermal evaporator is configured for non-reactive deposition of metal contact stacks , metal masking layers, some dielectrics, ITO.
- Facility:
- Clean Rooms - Nanofabrication
- Part of:
- Mechanical Engineering
Faculty of Engineering and the Environment - Location:
- R J Mitchell Wind Tunnel
Contact
YANG, YIFENG
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