Open Data Service, University of Southampton

Open Data Service

Coolpower 4.2Gm Two Stge Systems (Obsolete/Decommissioned YE 15/16 - per YY 04/08/2016)

BAK600 e-gun/thermal evaporator is configured for non-reactive deposition of metal contact stacks , metal masking layers, some dielectrics, ITO.

Facility: Clean Rooms - Nanofabrication
Part of: Engineering Sciences
Faculty of Engineering and the Environment
Location: R J Mitchell Wind Tunnel

Contact

YANG, YIFENG

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Facilities and Equipment