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Polytec MSA-400 Micro System Analyzer

3D MEMS dynamics and topography tester. Scanning laser vibrometry for out of plane vibrations up to 20MHz, stroboscopic video microscopy for in-plane motion & vibrations, white light interferometry for surface topography http://data.southampton.ac.uk/equipment/E10277.html

Facility:: Clean Rooms - Nanofabrication
Part of:: School of Electronics & Computer Science
Physical Sciences and Engineering
Location:: New Mountbatten

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CHONG, HAROLD

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