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Vanadium Fibre Laser

Wafer scribing tool, Vanadium Fibre Laser (1064nm wavelength, 0.25mJ pulse energy, 25um spot size), up to 5000 mm/s scanning speed, programmable z-axis, 245 lens upgrade allowing 220mm diameter field size, vision system for lase focusiing

Facility:: Clean Rooms - Nanofabrication
Part of:: School of Electronics & Computer Science
Physical Sciences and Engineering
Location:: New Mountbatten

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LESSEY, MARK

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