Open Data Service, University of Southampton

Open Data Service

KLA Tencor Alpha Step IQ Stylus Profier

The Alpha-Step IQ stylus-based surface profiler combines high measurement precision with versatility and economy. Ideal for semiconductor pilot lines and materials research, this advanced surface profiler enables faster process learning and higher yields. With guaranteed 8? (1 sigma) or 0.1% step height repeatability and sub-angstrom resolution, the Alpha-Step IQ surface profiler provides excellent repeatability and performance to analyze and monitor processes.

Facility: Clean Rooms - Integrated Photonics
Part of: Physical Sciences and Engineering
Optoelectronics Research Centre
Location: New Mountbatten

Contact

SESSIONS, NEIL

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