Clean Rooms - Integrated Photonics

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The Integrated Photonics Cleanroom is a 200m² Class 1000 facility with local areas of Class 100, designed for planar processing of a very wide range of materials. The prime purpose of this facility is to be able to take raw materials, ORC-made materials, or commercial materials and process them to realise photonic devices for use in applications from telecommunications to all-optical data processing and from biochemical sensing to the lab-on-a-chip. Polishing and scanning electron microscopy are available outside the cleanroom. The major equipment items are: Karl-Suss MA6 double-sided mask aligner, OPT Plasmalab 400 Sputtering Machine, Ionafab 300 Plus Reactive Ion Beam Depostit/Etcher, Edwards Auto 306 thermal evaporators, Edwards Auto 306 electron beam evaporator, Materials Research 2300c Furnace, Severn (STS) 1200c Tube Furnace, Instron 600c Ion-Exchange Furnaces, KLA Tencor P-16 Stylus Profiler, Nikon LV100D Optical Microscope and Wet Benches for Chemical Processing.

Contact

SESSIONS, NEIL - +442380592960

Information

RCUK Costed:

Yes

School/Dept:

Physical Sciences and Engineering

Building:

New Mountbatten

Equipment

• Auto 500 Electron Beam Deposition System

• 600C Environmental Oven

• P-16+ Stylus Surface Profiler

• KLA Tencor Alpha Step IQ Stylus Profier

• MRF High Temperature Vacuum Furnace

• Plasmalab 80 Plus / Compact Modular Plasma System

• Plasmalab System 400 / Magnetron Sputtering System

• GX Custom FT-IR Spectrometer (obsolete 1718)

• MA6 Mask Aligner

• Ionfab 300 Plus / Load Locked Ion Beam Etch System

• Planar Air Bearing System

• MJB4 Mask Aligner

• Three Zone, Bench Top 1700C Tube Furnace

• Nanolink DPN 5000 System

• ZeMetrics ZeScope Optical Profiling System

• Nano 38 Sputting Machine Lesker Sputter System

• PVA Tepla 300 Plasma System

• Flame Hydrolysis Deposition Chamber - 1 of 2

• Flame Hydrolysis Deposition Chamber - 2 of 2

• Vertical Furnace