Open Data Service, University of Southampton

Open Data Service

PVA Tepla 300 Plasma System

Facility: Clean Rooms - Integrated Photonics
Part of: School of Electronics & Computer Science
Physical Sciences and Engineering
Location: New Mountbatten

Contact

SESSIONS, NEIL

If you have additions or corrections to a facility or equipment entry please contact your Faculty Finance Team.

Get the Data

If you're that way inclined, you can get the raw data used to create this page in various formats, as listed below.

TTLRDF/Turtle file
RDFRDF/XML file
RDF.HTMLHTML visualisation of raw data

The following open datasets were used to build this page:

Facilities and Equipment
Photographs of University of Southampton Things