Designed to meet the exacting requirements of wafer, flat panel display and optical inspection and fabrication. The ABL/ABLH9000 incorporates an active preload on both vertical and horizontal surfaces. The opposing thin-film pressure maintains the bearing nominal gap tolerance. This design, in addition to the large air-bearing surface that distributes the load over a large surface area, results in a stage with outstanding stiffness that is ideal for heavy or offset loading.

Facility:

Clean Rooms - Integrated Photonics

Part of:

Physical Sciences and Engineering
Optoelectronics Research Centre

Location:

New Mountbatten

Contact

GATES, JAMES