Planar Air Bearing System Photo
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Planar Air Bearing System
Designed to meet the exacting requirements of wafer, flat panel display and optical inspection and fabrication. The ABL/ABLH9000 incorporates an active preload on both vertical and horizontal surfaces. The opposing thin-film pressure maintains the bearing nominal gap tolerance. This design, in addition to the large air-bearing surface that distributes the load over a large surface area, results in a stage with outstanding stiffness that is ideal for heavy or offset loading.
- Facility:
- Clean Rooms - Integrated Photonics
- Part of:
- Physical Sciences and Engineering
Optoelectronics Research Centre - Location:
- New Mountbatten
Contact
GATES, JAMES
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