Planar Air Bearing System
Designed to meet the exacting requirements of wafer, flat panel display and optical inspection and fabrication. The ABL/ABLH9000 incorporates an active preload on both vertical and horizontal surfaces. The opposing thin-film pressure maintains the bearing nominal gap tolerance. This design, in addition to the large air-bearing surface that distributes the load over a large surface area, results in a stage with outstanding stiffness that is ideal for heavy or offset loading.
| Facility: | Clean Rooms - Integrated Photonics |
| Part of: | Physical Sciences and Engineering Optoelectronics Research Centre |
| Location: | New Mountbatten |
Contact
GATES, JAMES
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