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Plasmalab 80 Plus / Compact Modular Plasma System

Photograph of Plasmalab 80 Plus / Compact Modular Plasma System at the University of Southampton (thumbnail).

Parallel plate RF etcher for glass etching primarily using SF6 and CHF3. Can also be used for ashing using O2.

Facility:: Clean Rooms - Integrated Photonics
Part of:: Physical Sciences and Engineering
Faculty Central (FEPS)
Location:: New Mountbatten

Contact

LESSEY, MARK

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