Open Data Service

Plasmalab 80 Plus / Compact Modular Plasma System

Parallel plate RF etcher for glass etching primarily using SF6 and CHF3. Can also be used for ashing using O2.

Facility:
Clean Rooms - Integrated Photonics
Part of:
Physical Sciences and Engineering
Faculty Central (FEPS)
Location:
New Mountbatten

Contact

LESSEY, MARK

Plasmalab 80 Plus / Compact Modular Plasma System Photo

Photograph of Plasmalab 80 Plus / Compact Modular Plasma System at the University of Southampton (thumbnail).
If you have additions or corrections to a facility or equipment entry please contact your Faculty Finance Team.

Get the Data

You can download the raw data used to create this page:

  • TTL - RDF/Turtle file
  • RDF - RDF/XML file
  • RDF.HTML - HTML visualisation of raw data

The following open datasets were used to build this page:

© 2025 University of Southampton