Plasmalab 80 Plus / Compact Modular Plasma System
Parallel plate RF etcher for glass etching primarily using SF6 and CHF3. Can also be used for ashing using O2.
| Facility: | Clean Rooms - Integrated Photonics |
| Part of: | Physical Sciences and Engineering Faculty Central (FEPS) |
| Location: | New Mountbatten |
Contact
LESSEY, MARK
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