XF2 Insulator Enhanced Etch Gas Injector
Gas injection system for chemically-assisted focused ion beam milling of insulating materials
| Facility: | Clean Rooms - Focused ion beam (FIB) |
| Part of: | Physical Sciences and Engineering Optoelectronics Research Centre |
| Location: | New Mountbatten |
Contact
MACDONALD, KEVIN
+442380593085
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