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XF2 Insulator Enhanced Etch Gas Injector
Gas injection system for chemically-assisted focused ion beam milling of insulating materials
- Facility:
- Clean Rooms - Focused ion beam (FIB)
- Part of:
- Physical Sciences and Engineering
Optoelectronics Research Centre - Location:
- New Mountbatten
Contact
MACDONALD, KEVIN
+442380593085
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