Open Data Service, University of Southampton

Open Data Service

Plasmalab 80 Plus / Compact Modular Plasma System

Parallel plate RF etcher for glass etching primarily using SF6 and CHF3. Can also be used for ashing using O2.

Facility: Clean Rooms - Integrated Photonics
Part of: Physical Sciences and Engineering
Faculty Central (FEPS)
Location: New Mountbatten



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