Open Data Service, University of Southampton

Open Data Service

EVG150 Automated Resist Processing System

Designed to provide the widest range of process variations, the EVG100 series` modularity accepts spin and spray coating, developing, bake and chill modules to suit your individual production requirements. These systems accommodate the processing of an extensive range of materials such as positive and negative resists, polyimides, double-sided coating of thin resist layers, high viscosity resists, and edge protection coatings.

Facility: Clean Rooms - Nanofabrication
Part of: School of Electronics & Computer Science
Physical Sciences and Engineering
Location: New Mountbatten



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